Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 19 (1), 015002, 2008 | 110 | 2008 |
A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High-22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ... IEEE Electron Device Letters 30 (7), 718-720, 2009 | 84 | 2009 |
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol Sensors and Actuators A: Physical 197, 88-95, 2013 | 72 | 2013 |
MEMS gyroscope with concentrated springs suspensions demonstrating single digit frequency split and temperature robustness J Giner, D Maeda, K Ono, AM Shkel, T Sekiguchi Journal of Microelectromechanical Systems 28 (1), 25-35, 2018 | 37 | 2018 |
Integration of NEMS resonators in a 65 nm CMOS technology JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ... Microelectronic Engineering 110, 246-249, 2013 | 36 | 2013 |
The concept of" collapsed electrodes" for glassblown spherical resonators demonstrating 200: 1 aspect ratio gap definition J Giner, AM Shkel 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS …, 2015 | 35 | 2015 |
Monolithic multiband MEMS RF front-end module for 5G mobile H Campanella, Y Qian, CO Romero, JS Wong, J Giner, R Kumar Journal of Microelectromechanical Systems 30 (1), 72-80, 2020 | 32 | 2020 |
MEMS Gyroscope with Less than 1-deg/h Bias Instability Variation in Temperature Range from− 40 C to 125 C D Maeda, K Ono, J Giner, M Matsumoto, M Kanamaru, T Sekiguchi, ... IEEE Sensors Journal 18 (3), 1006-1015, 2017 | 22 | 2017 |
Harvester-on-chip: Design of a proof of concept prototype G Murillo, G Abadal, F Torres, JL Lopez, J Giner, A Uranga, N Barniol Microelectronic engineering 86 (4-6), 1183-1186, 2009 | 22 | 2009 |
Zero-level packaging of MEMS in standard CMOS technology E Marigó, JL Lopez, G Murillo, F Torres, J Giner, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 20 (6), 064009, 2010 | 19 | 2010 |
Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators J Giner, A Uranga, F Torres, E Marigo, N Barniol Electronics letters 46 (9), 640, 2010 | 18 | 2010 |
A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators J Giner, A Uranga, JL Muñóz-Gamarra, E Marigó, N Barniol Journal of Micromechanics and Microengineering 22 (5), 055020, 2012 | 17 | 2012 |
VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator JL Lopez, J Verd, A Uranga, G Murillo, J Giner, E Marigó, F Torres, ... Procedia Chemistry 1 (1), 1131-1134, 2009 | 16 | 2009 |
Design, fabrication, and characterization of a micromachined glass-blown spherical resonator with insitu integrated silicon electrodes and ALD tungsten interior coating J Giner, JM Gray, J Gertsch, VM Bright, AM Shkel 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 15 | 2015 |
Monolithically integrated double-ended tuning fork-based oscillator with low bias voltage in air conditions JL Lopez, J Verd, E Marigó, A Uranga, G Murillo, J Giner, F Torres, ... Procedia Chemistry 1 (1), 614-617, 2009 | 13 | 2009 |
High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters JL López, J Verd, J Giner, A Uranga, G Murillo, E Marigo, F Torres, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 12 | 2009 |
Dynamicaly balanced degenerate mode gyro with sub-hz frequency symmetry and temperature robustness J Giner, Y Zhang, D Maeda, K Ono, AM Shkel, T Sekiguchi 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 11 | 2017 |
Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator J Giner, A Uranga, E Marigò, JL Muñoz-Gamarra, E Colinet, N Barniol, ... Microelectronic engineering 98, 599-602, 2012 | 10 | 2012 |
Electrically Enhanced Readout System for a High‐Frequency CMOS‐MEMS Resonator A Uranga, J Verd, JL Lopez, J Teva, F Torres, JJ Giner, G Murillo, ... ETRI journal 31 (4), 478-480, 2009 | 9 | 2009 |
Monolithic MEMS filter banks on RFSOI front-end module H Campanella, Y Qian, CO Romero, J Giner, R Kumar 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020 | 8 | 2020 |