| Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules T Chowdhury, R Hidayat, TR Mayangsari, J Gu, HL Kim, J Jung, WJ Lee Journal of Vacuum Science & Technology A 37 (2), 2019 | 24 | 2019 |
| Out-of-plane polarization in a layered manganese chloride hybrid ME Kamminga, R Hidayat, J Baas, GR Blake, T Palstra APL materials 6 (6), 2018 | 19 | 2018 |
| Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride TR Mayangsari, LL Yusup, R Hidayat, T Chowdhury, YK Kwon, WJ Lee Applied Surface Science 535, 147727, 2021 | 13 | 2021 |
| Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study R Hidayat, HL Kim, K Khumaini, T Chowdhury, TR Mayangsari, B Cho, ... Physical Chemistry Chemical Physics 25 (5), 3890-3899, 2023 | 10 | 2023 |
| Density functional theory study on the selective capping of cobalt on copper interconnect K Khumaini, R Hidayat, TR Mayangsari, T Chowdhury, HL Kim, SI Lee, ... Applied Surface Science 585, 152750, 2022 | 10 | 2022 |
| Density Functional Theory Study on the Reducing Agents for Atomic Layer Deposition of Tungsten Using Tungsten Chloride Precursor R Hidayat, T Chowdhury, Y Kim, S Kim, TR Mayangsari, SH Kim, WJ Lee Applied Surface Science, 148156, 2021 | 10 | 2021 |
| Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory M Lee, R Hidayat, DK Nandi, TH Kim, Y Kim, S Kim, WJ Lee, SH Kim Applied Surface Science 563, 150373, 2021 | 9 | 2021 |
| Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study R Hidayat, HL Kim, H Kim, Y Byun, J Lee, WJ Lee Journal of Vacuum Science & Technology A 39 (3), 2021 | 9 | 2021 |
| Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand S Kim, R Hidayat, H Roh, J Kim, HL Kim, K Khumaini, M Park, JH Seok, ... Journal of Materials Chemistry C 10 (17), 6696-6709, 2022 | 8 | 2022 |
| Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules T Chowdhury, R Hidayat, HL Kim, TR Mayangsari, S Cho, S Park, J Jung, ... Applied Surface Science 554, 149481, 2021 | 6 | 2021 |
| Biopolymer-based slow/controlled-release fertilizer (SRF/CRF): Nutrient release mechanism and agricultural sustainability A Firmanda, F Fahma, K Syamsu, M Mahardika, L Suryanegara, A Munif, ... Journal of Environmental Chemical Engineering, 112177, 2024 | 4 | 2024 |
| Erratum:“Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules”[J. Vac. Sci … T Chowdhury, R Hidayat, TR Mayangsari, J Gu, HL Kim, J Jung, WJ Lee Journal of Vacuum Science & Technology A 40 (4), 2022 | 3 | 2022 |
| Atomic layer deposition and tellurization of Ge–Sb film for phase-change memory applications Y Kim, B Han, YJ Kim, J Shin, S Kim, R Hidayat, JM Park, W Koh, WJ Lee RSC advances 9 (30), 17291-17298, 2019 | 3 | 2019 |
| Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study R Hidayat, K Khumaini, HL Kim, T Chowdhury, TR Mayangsari, S Cho, ... Journal of Vacuum Science & Technology A 41 (3), 2023 | 1 | 2023 |
| A theoretical study on the surface reaction of tetrakis (dimethylamino) titanium on titanium oxide HL Kim, R Hidayat, K Khumaini, WJ Lee Physical Chemistry Chemical Physics 25 (33), 22250-22257, 2023 | 1 | 2023 |
| Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2-and 3-step atomic layer deposition process JH Lee, R Hidayat, R Ramesh, H Roh, DK Nandi, WJ Lee, SH Kim Applied Surface Science 578, 152062, 2022 | 1 | 2022 |
| Chemisorption of tetrakis (dimethylamino) zirconium on zirconium oxide: Density functional theory study R Hidayat, HL Kim, YR Sriwijaya, K Khumaini, WJ Lee Surfaces and Interfaces 50, 104480, 2024 | | 2024 |
| Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride K Khumaini, Y Kim, R Hidayat, T Chowdhury, HL Kim, B Cho, S Park, ... Applied Surface Science 654, 159414, 2024 | | 2024 |
| Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study T Chowdhury, K Khumaini, R Hidayat, HL Kim, WJ Lee Physical Chemistry Chemical Physics 26 (15), 11597-11603, 2024 | | 2024 |
| Thermal Atomic Layer Deposition of Silicon Carbonitride: A Density Functional Theory Study T Chowdhury, YR Choi, Y Kim, HL Kim, K Khumaini, R Hidayat, JS An, ... Electrochemical Society Meeting Abstracts 244, 1507-1507, 2023 | | 2023 |
Tirta Rona MayangsariUniversitas Pertamina在 universitaspertamina.ac.id 的电子邮件经过验证
