| Understanding molecular layer deposition growth mechanisms in polyurea via picosecond acoustics analysis RA Nye, AP Kelliher, JT Gaskins, PE Hopkins, GN Parsons Chemistry of Materials 32 (4), 1553-1563, 2020 | 27 | 2020 |
| Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition RA Nye, SK Song, K Van Dongen, A Delabie, GN Parsons Applied physics letters 121 (8), 2022 | 15 | 2022 |
| In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors RA Nye, S Wang, S Uhlenbrock, JA Smythe, GN Parsons Dalton Transactions 51 (5), 1838-1849, 2022 | 15 | 2022 |
| Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions K Van Dongen, RA Nye, JWJ Clerix, C Sixt, D De Simone, A Delabie Journal of Vacuum Science & Technology A 41 (3), 2023 | 7 | 2023 |
| Enhancing performance and function of polymethacrylate extreme ultraviolet resists using area-selective deposition RA Nye, K Van Dongen, D De Simone, H Oka, GN Parsons, A Delabie Chemistry of Materials 35 (5), 2016-2026, 2023 | 6 | 2023 |
| Compatibility between polymethacrylate-based extreme ultraviolet resists and area-selective deposition RA Nye, K Van Dongen, H Oka, D De Simone, GN Parsons, A Delabie Journal of Micro/Nanopatterning, Materials, and Metrology 21 (4), 041407-041407, 2022 | 6 | 2022 |
| Shock initiation of reactive nanolaminates SM Matveev, DD Dlott, P Hanusova, JP Maria, R Nye, G Parsons AIP Conference Proceedings 2272 (1), 2020 | 6 | 2020 |
| Improving polymethacrylate EUV resists with TiO2 area-selective deposition RA Nye, K Van Dongen, H Oka, H Furutani, G Parsons, D De Simone, ... Advances in Patterning Materials and Processes XXXIX 12055, 83-91, 2022 | 5 | 2022 |
| A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition Y Kaneda, RA Nye, EA Marques, S Armini, A Delabie, MJ van Setten, ... The Journal of Physical Chemistry C 127 (21), 10303-10314, 2023 | 4 | 2023 |
| Quantified Uniformity and Selectivity of TiO2 Films in 45‐nm Half Pitch Patterns Using Area‐Selective Deposition Supercycles RA Nye, K Van Dongen, JF de Marneffe, GN Parsons, A Delabie Advanced Materials Interfaces 10 (20), 2300163, 2023 | 2 | 2023 |
| Disorder controlled sound speed and thermal conductivity of hybrid metalcone films MSB Hoque, RA Nye, S Zare, S Atkinson, S Wang, AH Jones, JT Gaskins, ... arXiv preprint arXiv:2402.13215, 2024 | 1 | 2024 |
| Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates RA Nye, NM Carroll, SE Morgan, GN Parsons Journal of Vacuum Science & Technology A 42 (1), 2024 | 1 | 2024 |
| Nucleation and Growth Mechanisms in Atomic and Molecular Layer Deposition for Applications in Microelectronics and Metal-Organic Frameworks RA Nye North Carolina State University, 2022 | | 2022 |
Gregory N ParsonsNorth Carolina State University在 ncsu.edu 的电子邮件经过验证
