Machine learning techniques applied for the detection of nanoparticles on surfaces using coherent Fourier scatterometry D Kolenov, SF Pereira Optics Express 28 (13), 19163-19186, 2020 | 20 | 2020 |
Convolutional neural network applied for nanoparticle classification using coherent scatterometry data D Kolenov, D Davidse, J Le Cam, SF Pereira Applied Optics 59 (27), 8426-8433, 2020 | 17 | 2020 |
Direct detection of polystyrene equivalent nanoparticles with a diameter of 21 nm (∼ λ/19) using coherent Fourier scatterometry D Kolenov, IE Zadeh, RC Horsten, SF Pereira Optics Express 29 (11), 16487-16505, 2021 | 10 | 2021 |
Heterodyne detection system for nanoparticle detection using coherent Fourier scatterometry D Kolenov, RC Horsten, SF Pereira Optical Measurement Systems for Industrial Inspection XI 11056, 110561A, 2019 | 6 | 2019 |
A highly sensitive laser focus positioning method with sub-micrometre accuracy using coherent Fourier scatterometry D Kolenov, P Meng, S Pereira Measurement Science and Technology 31 (6), 064007, 2020 | 2 | 2020 |
Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings A Paul, D Kolenov, T Scholte, SF Pereira Applied Optics 62 (29), 7589-7595, 2023 | 1 | 2023 |
Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography H Yin, D Kolenov, SF Pereira Optics Letters 47 (15), 3840-3843, 2022 | 1 | 2022 |
Effect of polarization in evanescent wave amplification for the enhancement of scattering of nanoparticles on surfaces D Kolenov, HP Urbach, SF Pereira OSA Continuum 3 (4), 742-758, 2020 | 1 | 2020 |