Power matching to pulsed inductively coupled plasmas C Qu, SJ Lanham, SC Shannon, SK Nam, MJ Kushner Journal of Applied Physics 127 (13), 2020 | 31 | 2020 |
Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber J Han, P Pribyl, W Gekelman, A Paterson, SJ Lanham, C Qu, MJ Kushner Physics of Plasmas 26 (10), 2019 | 28 | 2019 |
Properties of arrays of microplasmas: Application to control of electromagnetic waves C Qu, P Tian, A Semnani, MJ Kushner Plasma Sources Science and Technology 26 (10), 105006, 2017 | 18 | 2017 |
Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation C Qu, Y Sakiyama, P Agarwal, MJ Kushner Journal of Vacuum Science & Technology A 39 (5), 2021 | 11 | 2021 |
Transients using low-high pulsed power in inductively coupled plasmas C Qu, SK Nam, MJ Kushner Plasma Sources Science and Technology 29 (8), 085006, 2020 | 8 | 2020 |
Computational Investigations of Fundamental Plasma Processes in Semiconductor Industrial Applications C Qu | 1 | 2020 |
Research projects F PLUS Steel Construction 15 (2), 131, 2022 | | 2022 |
Power Matching to Pulsed Inductively Coupled Plasmas (vol 127, 133302, 2020) C Qu, SJ Lanham, SC Shannon, SK Nam, MJ Kushner JOURNAL OF APPLIED PHYSICS 128 (8), 2020 | | 2020 |
Measurements of material induced effects on the plasma parameters of an inductively coupled plasma J Brandon, C Qu, SK Nam, S Shannon, M Kushner APS Annual Gaseous Electronics Meeting Abstracts, TR3. 006, 2020 | | 2020 |
Optimizing Transient Behavior of a High-Low Pulsed Power Inductively Coupled Plasma C Qu, SJ Lanham, MJ Kushner, P Arora, T List, T Ma, VM Donnelly 9 th ANNUAL GRADUATE STUDENT SYMPOSIUM 1001, 14, 2018 | | 2018 |
Ignition Time and Transport Properties of Inductively Coupled Plasmas Using Low-High Pulsed Power C Qu, P Tian, SJ Lanham, MJ Kushner, T Ma, T List, P Arora, VM Donnelly 2018 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2018 | | 2018 |
Consequences of EH transitions in Impendence Matching of Pulsed Inductively Coupled Plasmas C Qu, S Lanham, P Tian, C Smith, K Ford, J Brandon, S Shannon, ... APS Annual Gaseous Electronics Meeting Abstracts, QR3. 008, 2018 | | 2018 |
Customizing Capacitively Coupled Plasma Properties with Triple-Frequency Power Sources C Qu, P Tian, S Huang, MJ Kushner Bulletin of the American Physical Society 62, 2017 | | 2017 |
Customizing arrays of microplasmas for controlling properties of electromagnetic waves C Qu, P Tian, MJ Kushner 2016 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2016 | | 2016 |
Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures P Tian, C Qu, MJ Kushner Bulletin of the American Physical Society 60, 2015 | | 2015 |
Scaling of Small Arrays of Microplasmas C Qu, P Tian, MJ Kushner APS Annual Gaseous Electronics Meeting Abstracts, LW1. 073, 2015 | | 2015 |
Computational Modeling of Processing Plasmas: Instabilities and Fluorocarbon Chemistry O Alsaeed, MS Hossain, B Yee, C Qu, M Mamunuru, B Scheiner, N Bhatt, ... | | |