关注
Chenhui Qu
Chenhui Qu
RF engineer, Lam Research Corp.
在 umich.edu 的电子邮件经过验证
标题
引用次数
引用次数
年份
Power matching to pulsed inductively coupled plasmas
C Qu, SJ Lanham, SC Shannon, SK Nam, MJ Kushner
Journal of Applied Physics 127 (13), 2020
312020
Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber
J Han, P Pribyl, W Gekelman, A Paterson, SJ Lanham, C Qu, MJ Kushner
Physics of Plasmas 26 (10), 2019
282019
Properties of arrays of microplasmas: Application to control of electromagnetic waves
C Qu, P Tian, A Semnani, MJ Kushner
Plasma Sources Science and Technology 26 (10), 105006, 2017
182017
Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation
C Qu, Y Sakiyama, P Agarwal, MJ Kushner
Journal of Vacuum Science & Technology A 39 (5), 2021
112021
Transients using low-high pulsed power in inductively coupled plasmas
C Qu, SK Nam, MJ Kushner
Plasma Sources Science and Technology 29 (8), 085006, 2020
82020
Computational Investigations of Fundamental Plasma Processes in Semiconductor Industrial Applications
C Qu
12020
Research projects
F PLUS
Steel Construction 15 (2), 131, 2022
2022
Power Matching to Pulsed Inductively Coupled Plasmas (vol 127, 133302, 2020)
C Qu, SJ Lanham, SC Shannon, SK Nam, MJ Kushner
JOURNAL OF APPLIED PHYSICS 128 (8), 2020
2020
Measurements of material induced effects on the plasma parameters of an inductively coupled plasma
J Brandon, C Qu, SK Nam, S Shannon, M Kushner
APS Annual Gaseous Electronics Meeting Abstracts, TR3. 006, 2020
2020
Optimizing Transient Behavior of a High-Low Pulsed Power Inductively Coupled Plasma
C Qu, SJ Lanham, MJ Kushner, P Arora, T List, T Ma, VM Donnelly
9 th ANNUAL GRADUATE STUDENT SYMPOSIUM 1001, 14, 2018
2018
Ignition Time and Transport Properties of Inductively Coupled Plasmas Using Low-High Pulsed Power
C Qu, P Tian, SJ Lanham, MJ Kushner, T Ma, T List, P Arora, VM Donnelly
2018 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2018
2018
Consequences of EH transitions in Impendence Matching of Pulsed Inductively Coupled Plasmas
C Qu, S Lanham, P Tian, C Smith, K Ford, J Brandon, S Shannon, ...
APS Annual Gaseous Electronics Meeting Abstracts, QR3. 008, 2018
2018
Customizing Capacitively Coupled Plasma Properties with Triple-Frequency Power Sources
C Qu, P Tian, S Huang, MJ Kushner
Bulletin of the American Physical Society 62, 2017
2017
Customizing arrays of microplasmas for controlling properties of electromagnetic waves
C Qu, P Tian, MJ Kushner
2016 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2016
2016
Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures
P Tian, C Qu, MJ Kushner
Bulletin of the American Physical Society 60, 2015
2015
Scaling of Small Arrays of Microplasmas
C Qu, P Tian, MJ Kushner
APS Annual Gaseous Electronics Meeting Abstracts, LW1. 073, 2015
2015
Computational Modeling of Processing Plasmas: Instabilities and Fluorocarbon Chemistry
O Alsaeed, MS Hossain, B Yee, C Qu, M Mamunuru, B Scheiner, N Bhatt, ...
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