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Xu Han
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Enhanced Data-Driven Virtual Metrology on Chemical Mechanical Planarization Process Using Dual Linear Kalman Filter
AU Rahman, X Han, X Jia
International Manufacturing Science and Engineering Conference 88117 …, 2024
12024
Designing Robust Topological Features for Wafer Map Pattern Classification
X Han, X Jia, DY Ji, J Lee
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2023
12023
A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling
X Han, M Miller, J Moyne, GW Vogl, A Penkova, X Jia
IEEE Transactions on Semiconductor Manufacturing, 2025
2025
A Novel Methodology for Intracranial Pressure Subpeak Identification Enabling Morphological Feature Analysis
VV Kalaiarasan, M Miller, X Han, B Foreman, X Jia
IEEE Transactions on Biomedical Engineering, 2024
2024
Robust feature design for early detection of ball screw preload loss
X Han, M Miller, GW Vogl, G Chen, X Jia
Manufacturing Letters 41, 1225-1230, 2024
2024
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