Enhanced Data-Driven Virtual Metrology on Chemical Mechanical Planarization Process Using Dual Linear Kalman Filter AU Rahman, X Han, X Jia International Manufacturing Science and Engineering Conference 88117 …, 2024 | 1 | 2024 |
Designing Robust Topological Features for Wafer Map Pattern Classification X Han, X Jia, DY Ji, J Lee 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2023 | 1 | 2023 |
A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling X Han, M Miller, J Moyne, GW Vogl, A Penkova, X Jia IEEE Transactions on Semiconductor Manufacturing, 2025 | | 2025 |
A Novel Methodology for Intracranial Pressure Subpeak Identification Enabling Morphological Feature Analysis VV Kalaiarasan, M Miller, X Han, B Foreman, X Jia IEEE Transactions on Biomedical Engineering, 2024 | | 2024 |
Robust feature design for early detection of ball screw preload loss X Han, M Miller, GW Vogl, G Chen, X Jia Manufacturing Letters 41, 1225-1230, 2024 | | 2024 |