Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications M Gillinger, T Knobloch, A Marković, G Pfusterschmied, M Schneider, ... Materials Science in Semiconductor Processing 81, 1-6, 2018 | 17 | 2018 |
Ultra-Low-Power Logic with Contactless Capacitive MEMS A Marković, L Mazenq, A Laborde, H Fanet, G Pillonnet, B Legrand 2022 21st International Conference on Micro and Nanotechnology for Power …, 2022 | 5 | 2022 |
Adiabatic Logic Gates for Ultra-Low-Power Operation Using Contactless Capacitive MEMS A Marković, L Mazenq, A Laborde, H Fanet, G Pillonnet, B Legrand 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 1 | 2023 |
Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration A Marković, H Fanet, G Pillonnet, B Legrand Sensors and Actuators A: Physical 376, 115652, 2024 | | 2024 |
Suspended tip overhanging from chip edge for atomic force microscopy with an optomechanical resonator A Marković, M Lefebvre, L Mazenq, S Charlot, M Gély, A Lecestre, ... Journal of Optical Microsystems 4 (3), 033501-033501, 2024 | | 2024 |
Multi‐and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication M Rostami, A Marković, Y Wang, J Pernollet, X Zhang, X Liu, J Brugger Advanced Science 11 (12), 2303518, 2024 | | 2024 |
Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime A Markovic, G Pillonnet, B Legrand Workshop nano, meso, micro: Science and innovation for radio and photonics …, 2022 | | 2022 |