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Niclas Manuel Feil
Niclas Manuel Feil
Dr.-Ing.
在 inatech.uni-freiburg.de 的电子邮件经过验证
标题
引用次数
引用次数
年份
Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
N Kurz, A Ding, DF Urban, Y Lu, L Kirste, NM Feil, A Žukauskaitė, ...
Journal of Applied Physics 126 (7), 2019
912019
Wurtzite ScAlN, InAlN, and GaAlN crystals, a comparison of structural, elastic, dielectric, and piezoelectric properties
O Ambacher, B Christian, N Feil, DF Urban, C Elsässer, M Prescher, ...
Journal of Applied Physics 130 (4), 2021
812021
Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0. 77Sc0. 23N 112¯ thin films
A Ding, L Kirste, Y Lu, R Driad, N Kurz, V Lebedev, T Christoph, NM Feil, ...
Applied Physics Letters 116 (10), 2020
462020
Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures
NM Feil, E Mayer, A Nair, B Christian, A Ding, C Sun, S Mihalic, M Kessel, ...
Journal of Applied Physics 130 (16), 164501, 2021
112021
Finite element analysis of SAW propagation characteristics in c-plane (0001) and a-plane (11-20) ALScN thin films
NM Feil, N Kurz, DF Urban, A Altayara, B Christian, A Ding, A Žukauskaitė, ...
2019 IEEE International Ultrasonics Symposium (IUS), 2588-2591, 2019
112019
Non-Polar a-plane AlScN() Thin Film Based SAW Resonators with Significantly Improved Electromechanical Coupling
A Ding, R Driad, Y Lu, NM Feil, L Kirste, T Christoph, O Ambacher, ...
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
72020
Growth Optimization of Nonpolar Al0.7Sc0.3N()/Al2O3() Thin Films Using Reactive Magnetron Sputter Epitaxy
A Nair, M Kessel, L Kirste, NM Feil, M Prescher, A Žukauskaitė
physica status solidi (a) 219 (24), 2200380, 2022
52022
Rayleigh waves in nonpolar Al0. 7Sc0. 3N (112¯ 0) films with enhanced electromechanical coupling and quality factor
NM Feil, A Nair, V Pashchenko, L Kirste, O Ambacher
Applied Physics Letters 121 (19), 2022
42022
Influence of alloying and structural transition on the directional elastic and isotropic thermodynamic properties of wurtzite and layered hexagonal ScxAl1− xN crystals
O Ambacher, S Mihalic, E Wade, M Yassine, A Yassine, N Feil, ...
Journal of Applied Physics 132 (17), 2022
42022
Novel method for extracting material constants of epitaxial wurtzite AlScN films on sapphire using higher order surface acoustic wave modes
NM Feil, E Mayer, B Christian, A Ding, A Žukauskaitė, O Ambacher
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
42020
Determining elastic constants of AlScN films on silicon substrates by laser ultrasonics
O Rogall, NM Feil, A Ding, E Mayer, PD Pupyrev, AM Lomonosov, ...
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
22020
In-plane ferroelectric switching of non-polar wurtzite AlScN films using SAW resonators
M Yassine, N Feil, A Nair, A Graff, R Driad, F Benkhelifa, E Wade, ...
Elsevier, 2023
2023
Chapter Four-In-plane ferroelectric switching of non-polar wurtzite AlScN films using SAW resonators
M Yassine, N Feil, A Nair, A Greiff, R Driad, E Wade, F Benkhelifa, ...
2023
Growth Optimization of Nonpolar Al0.7Sc0.3N(112¯0)/Al2O3(11¯02) Thin Films Using Reactive Magnetron Sputter Epitaxy.
A Nair, M Kessel, L Kirste, NM Feil, M Prescher, A Žukauskaitė
Physica Status Solidi. A: Applications & Materials Science 219 (24), 2022
2022
SAW-Bauelement und Verfahren zu dessen Betrieb und Verwendung
A Ding, NM Feil
2022
Aluminium-Scandium-Nitrid für breitbandige Oberflächenwellenfilter
N Feil
2022
Aluminium-Scandium-Nitrid für breitbandige Oberflächenwellenfilter
NM Feil
Dissertation, Universität Freiburg, 2022
2022
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