关注
Seulgi Choi
Seulgi Choi
Engineer of Etch, Lam Research
在 skku.edu 的电子邮件经过验证
标题
引用次数
引用次数
年份
A numerical study on slurry flow with CMP pad grooves
S Hong, S Bae, S Choi, P Liu, H Kim, T Kim
Microelectronic Engineering 234, 111437, 2020
82020
AYDIN et al.
K Aydin, S Woo, VK Kanade, S Choi, C Ahn, B Lim, T Kim
Carbon Energy 5 (11), 2023
72023
A study of highly activated hydrogen evolution reaction performance in acidic media by 2D heterostructure of N and S doped graphene on MoOx
K Aydin, S Woo, VK Kanade, S Choi, C Ahn, B Lim, T Kim
Carbon Energy 5 (11), e340, 2023
42023
Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing
S Choi, G Im, E Kim, K Park, T Kim
Journal of Industrial and Engineering Chemistry 107, 207-214, 2022
42022
Uniform deposition method of monodispersed SiO2 nanoparticles on a 300-mm Si wafer surface
S Lee, S Choi, Y Cho, H Oh, SK Chae, T Kim
Review of Scientific Instruments 92 (11), 2021
22021
QMOM 접근법에 의한 CMP 의 실리카 나노 입자 응집 시뮬레이션
최슬기, 류펑잔, 김태성
대한기계학회 춘추학술대회, 320-321, 2021
2021
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