| A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions S Shubham, Y Seo, V Naderyan, X Song, AJ Frank, JTMG Johnson, ... Micromachines 13 (1), 22, 2021 | 22 | 2021 |
| Estimating parasitic capacitances in mems microphones using finite element modeling S Shubham, M Nawaz Proceedings of the COMSOL Conference, 2019 | 6 | 2019 |
| Dielectric comb for mems device M Nawaz, S Shubham, D Schafer, M Pedersen, C Furst, M Shajaan, ... US Patent US-11825266-B2, 2023 | 5 | 2023 |
| Silicon Nitride Corrugated Membrane with High-Width-Aspect-Ratio for MEMS Microphones S Shubham Proceedings of the COMSOL Conference, 2020 | 3 | 2020 |
| A compact high performance micro-electro-mechanical systems microphone Y Ma, S Shubham, M Kuntzman, JI Cheng, J Ouyang 184TH MEETING OF THE ACOUSTICAL SOCIETY OF AMERICA 153 (3_supplement), 2023 | 2 | 2023 |
| Reliability Analysis using Advanced Modeling Technique for MEMS Microphone S Shubham, X Song, Y Ma, MG Da Silva, Z Guo, J Johnson, M Pedersen 2021 IEEE International Symposium on the Physical and Failure Analysis of …, 2021 | 2 | 2021 |
| Dual-Diaphragm MEMS Transducers with High Effective Area S Shubham, J Guo US Patent App. 17/825,804, 2023 | 1 | 2023 |
| MEMS device with a diaphragm having a slotted layer S Shubham, H Lin US Patent 11,323,823, 2022 | 1 | 2022 |
| Analysis of Mechanical Sensitivity of MEMS Pressure Diaphragm for Contact Formation S Shubham, M Nawaz Proceedings of the COMSOL Conference, Boston, MA, USA, 2018 | 1 | 2018 |
| A behavioral nonlinear modeling implementation for MEMS capacitive microphones S Shubham, M Nawaz, X Song, Y Seo, F Zaman, M Kuntzman, ... Sensors and Actuators A: Physical 371, 2024 | | 2024 |
| Suspension for a mems vibration sensor F Zaman, S Shubham, K Deng US Patent App. 17/847,979, 2023 | | 2023 |
| Mems die and mems-based vibration sensor K Deng, M Pedersen, RLC Chen, S Shubham, F Zaman US Patent App. 17/869,870, 2023 | | 2023 |
| Intrinsic-stress self-compensated microelectromechanical systems transducer M Nawaz, S Shubham US Patent 11,575,996, 2023 | | 2023 |
| A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones S Shubham, M Nawaz, X Song, Y Seo, F Zaman, M Kuntzman, ... TechRxiv, 2022 | | 2022 |
