Low-cost interference lithography CP Fucetola, H Korre, KK Berggren Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 51 | 2009 |
Development of a simple, compact, low-cost interference lithography system H Korre, CP Fucetola, JA Johnson, KK Berggren Journal of Vacuum Science & Technology B 28 (6), C6Q20-C6Q24, 2010 | 31 | 2010 |
System and methods related to generating electromagnetic radiation interference patterns KK Berggren, H Korre, CP Fucetola US Patent 8,625,075, 2014 | 3 | 2014 |
Cavity-integrated ultra-narrow superconducting nanowire single-photon detector based on a thick niobium nitride film F Marsili, F Najafi, EA Dauler, H Korre, V Anant, K Sunter, KK Berggren Quantum Electronics and Laser Science Conference, QTu3E. 3, 2012 | 3 | 2012 |
On the development of a low-cost lithographic interferometer H Korre Massachusetts Institute of Technology, 2010 | 2 | 2010 |
MTL ANNUAL RESEARCH REPORT 2013 F Bellei, AN McCaughan, F Najafi, D Zhao, HA Korre, KK Berggren | | |