| Fabrication of suspended microchannel resonators with integrated piezoelectric transduction A De Pastina, D Maillard, LG Villanueva Microelectronic Engineering 192, 83-87, 2018 | 51 | 2018 |
| Micro 3D printing of a functional MEMS accelerometer S Pagliano, DE Marschner, D Maillard, N Ehrmann, G Stemme, S Braun, ... Microsystems & Nanoengineering 8 (1), 105, 2022 | 40 | 2022 |
| Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity D Maillard, A De Pastina, AM Abazari, LG Villanueva Microsystems & Nanoengineering 7 (1), 34, 2021 | 17 | 2021 |
| Thin film devices for 5G communications S Yandrapalli, M Liffredo, M Faizan, S Küçük, D Maillard, LG Villanueva 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 17 | 2021 |
| Modular interface and experimental setup for in-vacuum operation of microfluidic devices D Maillard, A De Pastina, T Larsen, LG Villanueva Review of Scientific Instruments 90 (4), 2019 | 8 | 2019 |
| Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel D Scaiola, S Stassi, R Calmo, D Maillard, SSG Varricchio, A De Pastina, ... Microelectronic Engineering 231, 111395, 2020 | 5 | 2020 |
| Electron-beam lithography on M108Y and M35G chemically amplified DUV photoresists D Maillard, Z Benes, N Piacentini, LG Villanueva Micro and Nano Engineering 13, 100095, 2021 | 4 | 2021 |
| Optimization of channel design and fabrication for suspended microchannels resonators with a 3D Nanoprinter L Frehner, D Maillard | 2 | 2018 |
| A 3D-printed functional MEMS accelerometer S Pagliano, DE Marschner, D Maillard, N Ehrmann, G Stemme, S Braun, ... 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 1 | 2023 |
| Piezoelectric suspended microchannel resonators D Maillard EPFL, 2022 | 1 | 2022 |
| Single bacteria detection via piezoelectric suspended microchannel resonators A De Pastina, D Maillard, B Özel Duygan 23rd International Conference on Miniaturized Systems for Chemistry and Life …, 2019 | 1 | 2019 |
| Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators D Maillard, A De Pastina Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, 2017 | 1 | 2017 |
| Development of a microfluidic interface for suspended microchannel resonators D Maillard | 1 | 2016 |
| Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators M Neuenschwander, D Maillard, N Hosseini, M Kangül, LG Villanueva, ... Sensors and Actuators A: Physical, 116217, 2025 | | 2025 |
| Balancing of Coupled Piezoelectric NEMS Resonators J Fan, J Lemonde, D Maillard, M Käppeli, LG Villanueva Frontiers in Mechanical Engineering 7, 722538, 2021 | | 2021 |
| Optimization of Channel Design and Fabrication of Suspended Microchannel Resonators S Jia, D Maillard | | 2019 |
| Piezoelectric Suspended Microchannel Resonators (SMRs) A De Pastina, D Maillard, LG Villanueva 15th International Workshop on Nanomechanical Cantilever Sensors (NMC), 2018 | | 2018 |
| Fabrication of suspended microchannel resonators for biosensing application Z Daguin, D Maillard | | 2018 |
| Background cancellation methods D Maillard | | 2014 |
| NEMS MD Anderson, HB Atakan, F Ayhan, CR Ciressan, A Conde Rubio, ... | | |
