Fabrication and characterization of thin-film silicon resonators on 10 m-thick polyimide substrates TG Pestana, RMR Pinto, RA Dias, M Martins, V Chu, J Gaspar, JP Conde Journal of Micromechanics and Microengineering 30 (4), 045007, 2020 | 8 | 2020 |
Coupled thin film hydrogenated amorphous silicon microresonator arrays TG Pestana, RMR Pinto, RA Dias, V Chu, JP Conde Journal of Microelectromechanical Systems 32 (1), 37-46, 2022 | 1 | 2022 |
Thin-film silicon resonators on ultra-flexible 10 micrometer-thick polyimide substrates TG Pestana, RMR Pinto, RA Dias, M Martins, V Chu, J Gaspar, JP Conde 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 1 | 2019 |
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays TG Pestana, RMR Pinto, RA Dias, V Chu, JP Conde Journal of Microelectromechanical Systems, 2023 | | 2023 |