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Tiago G. Pestana
Tiago G. Pestana
INESC MN
在 inesc-mn.pt 的电子邮件经过验证
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Fabrication and characterization of thin-film silicon resonators on 10 m-thick polyimide substrates
TG Pestana, RMR Pinto, RA Dias, M Martins, V Chu, J Gaspar, JP Conde
Journal of Micromechanics and Microengineering 30 (4), 045007, 2020
82020
Coupled thin film hydrogenated amorphous silicon microresonator arrays
TG Pestana, RMR Pinto, RA Dias, V Chu, JP Conde
Journal of Microelectromechanical Systems 32 (1), 37-46, 2022
12022
Thin-film silicon resonators on ultra-flexible 10 micrometer-thick polyimide substrates
TG Pestana, RMR Pinto, RA Dias, M Martins, V Chu, J Gaspar, JP Conde
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
12019
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays
TG Pestana, RMR Pinto, RA Dias, V Chu, JP Conde
Journal of Microelectromechanical Systems, 2023
2023
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