Quantifying transport and electrocatalytic reaction processes in a gastight rotating cylinder electrode reactor via integration of Computational Fluid Dynamics modeling and … D Richard, M Tom, J Jang, S Yun, PD Christofides, CG Morales-Guio Electrochimica Acta 440, 141698, 2023 | 16 | 2023 |
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design S Yun, M Tom, F Ou, G Orkoulas, PD Christofides Computers & Chemical Engineering 161, 107757, 2022 | 15 | 2022 |
Microscopic and data-driven modeling and operation of thermal atomic layer etching of aluminum oxide thin films S Yun, M Tom, J Luo, G Orkoulas, PD Christofides Chemical Engineering Research and Design 177, 96-107, 2022 | 14 | 2022 |
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor M Tom, S Yun, H Wang, F Ou, G Orkoulas, PD Christofides Computers & Chemical Engineering 168, 108044, 2022 | 13 | 2022 |
Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching S Yun, M Tom, G Orkoulas, PD Christofides Computers & Chemical Engineering 163, 107861, 2022 | 11 | 2022 |
Multiscale CFD modeling of area-selective atomic layer deposition: Application to reactor design and operating condition calculation S Yun, H Wang, M Tom, F Ou, G Orkoulas, PD Christofides Coatings 13 (3), 558, 2023 | 9 | 2023 |
Atomistic-mesoscopic modeling of area-selective thermal atomic layer deposition S Yun, F Ou, H Wang, M Tom, G Orkoulas, PD Christofides Chemical Engineering Research and Design 188, 271-286, 2022 | 8 | 2022 |
Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films S Yun, M Tom, F Ou, G Orkoulas, PD Christofides Chemical Engineering Research and Design 182, 1-12, 2022 | 8 | 2022 |
Multiscale modeling of spatial area-selective thermal atomic layer deposition M Tom, S Yun, H Wang, F Ou, G Orkoulas, PD Christofides Computer Aided Chemical Engineering 52, 71-76, 2023 | 4 | 2023 |
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation M Tom, H Wang, F Ou, S Yun, G Orkoulas, PD Christofides Computers & Chemical Engineering 178, 108400, 2023 | 2 | 2023 |
Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method H Wang, M Tom, F Ou, G Orkoulas, PD Christofides Digital Chemical Engineering 10, 100140, 2024 | 1 | 2024 |
Time-Series Multiscale Computational Fluid Dynamics Data Modeling with Transformers for Atomic Layer Processing H Wang, F Ou, J Suherman, M Tom, G Orkoulas, P Christofides 2024 AIChE Annual Meeting, 2024 | | 2024 |
Integrating run-to-run control with feedback control for a spatial atomic layer etching reactor H Wang, M Tom, F Ou, G Orkoulas, PD Christofides Chemical Engineering Research and Design 203, 1-10, 2024 | | 2024 |
Sparse identification modeling and predictive control of wafer temperature in an atomic layer etching reactor F Ou, F Abdullah, H Wang, M Tom, G Orkoulas, PD Christofides Chemical Engineering Research and Design 202, 1-11, 2024 | | 2024 |
First-Principles and Machine Learning Modeling for Design and Operation of Area-Selective Atomic Layer Deposition MCW Tom University of California, Los Angeles, 2024 | | 2024 |
Machine Learning Modeling and Run-to-Run Control of an Area-Selective Atomic Layer Deposition Spatial Reactor M Tom, H Wang, F Ou, G Orkoulas, PD Christofides Coatings 14 (1), 38, 2023 | | 2023 |
Time-Series Modeling for Run-to-Run Control of an Area-Selective Atomic Layer Deposition Process M Tom, S Yun, H Wang, F Ou, G Orkoulas, P Christofides 2023 AIChE Annual Meeting, 2023 | | 2023 |
Evaluating Hydrodynamic and Homogeneous Buffer Reaction Effects on the Electrochemical Hydrogen Evolution Reaction Using Experimentally Validated CFD Simulations D Richard, M Tom, S Yun, J Jang, P Christofides, C Morales-Guio 2023 AIChE Annual Meeting, 2023 | | 2023 |
Multiscale CFD Modeling of an Area-Selective Atomic Layer Deposition Process: Application to Discrete Feeding Reactor Configuration Design M Tom, H Wang, F Ou, G Orkoulas, P Christofides 2023 AIChE Annual Meeting, 2023 | | 2023 |
Real-Time Feedback Control of an Atomic Layer Etching Spatial Reactor F Ou, M Tom, H Wang, G Orkoulas, P Christofides 2023 AIChE Annual Meeting, 2023 | | 2023 |