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Matthew Tom
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Quantifying transport and electrocatalytic reaction processes in a gastight rotating cylinder electrode reactor via integration of Computational Fluid Dynamics modeling and …
D Richard, M Tom, J Jang, S Yun, PD Christofides, CG Morales-Guio
Electrochimica Acta 440, 141698, 2023
162023
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design
S Yun, M Tom, F Ou, G Orkoulas, PD Christofides
Computers & Chemical Engineering 161, 107757, 2022
152022
Microscopic and data-driven modeling and operation of thermal atomic layer etching of aluminum oxide thin films
S Yun, M Tom, J Luo, G Orkoulas, PD Christofides
Chemical Engineering Research and Design 177, 96-107, 2022
142022
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor
M Tom, S Yun, H Wang, F Ou, G Orkoulas, PD Christofides
Computers & Chemical Engineering 168, 108044, 2022
132022
Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching
S Yun, M Tom, G Orkoulas, PD Christofides
Computers & Chemical Engineering 163, 107861, 2022
112022
Multiscale CFD modeling of area-selective atomic layer deposition: Application to reactor design and operating condition calculation
S Yun, H Wang, M Tom, F Ou, G Orkoulas, PD Christofides
Coatings 13 (3), 558, 2023
92023
Atomistic-mesoscopic modeling of area-selective thermal atomic layer deposition
S Yun, F Ou, H Wang, M Tom, G Orkoulas, PD Christofides
Chemical Engineering Research and Design 188, 271-286, 2022
82022
Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films
S Yun, M Tom, F Ou, G Orkoulas, PD Christofides
Chemical Engineering Research and Design 182, 1-12, 2022
82022
Multiscale modeling of spatial area-selective thermal atomic layer deposition
M Tom, S Yun, H Wang, F Ou, G Orkoulas, PD Christofides
Computer Aided Chemical Engineering 52, 71-76, 2023
42023
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation
M Tom, H Wang, F Ou, S Yun, G Orkoulas, PD Christofides
Computers & Chemical Engineering 178, 108400, 2023
22023
Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method
H Wang, M Tom, F Ou, G Orkoulas, PD Christofides
Digital Chemical Engineering 10, 100140, 2024
12024
Time-Series Multiscale Computational Fluid Dynamics Data Modeling with Transformers for Atomic Layer Processing
H Wang, F Ou, J Suherman, M Tom, G Orkoulas, P Christofides
2024 AIChE Annual Meeting, 2024
2024
Integrating run-to-run control with feedback control for a spatial atomic layer etching reactor
H Wang, M Tom, F Ou, G Orkoulas, PD Christofides
Chemical Engineering Research and Design 203, 1-10, 2024
2024
Sparse identification modeling and predictive control of wafer temperature in an atomic layer etching reactor
F Ou, F Abdullah, H Wang, M Tom, G Orkoulas, PD Christofides
Chemical Engineering Research and Design 202, 1-11, 2024
2024
First-Principles and Machine Learning Modeling for Design and Operation of Area-Selective Atomic Layer Deposition
MCW Tom
University of California, Los Angeles, 2024
2024
Machine Learning Modeling and Run-to-Run Control of an Area-Selective Atomic Layer Deposition Spatial Reactor
M Tom, H Wang, F Ou, G Orkoulas, PD Christofides
Coatings 14 (1), 38, 2023
2023
Time-Series Modeling for Run-to-Run Control of an Area-Selective Atomic Layer Deposition Process
M Tom, S Yun, H Wang, F Ou, G Orkoulas, P Christofides
2023 AIChE Annual Meeting, 2023
2023
Evaluating Hydrodynamic and Homogeneous Buffer Reaction Effects on the Electrochemical Hydrogen Evolution Reaction Using Experimentally Validated CFD Simulations
D Richard, M Tom, S Yun, J Jang, P Christofides, C Morales-Guio
2023 AIChE Annual Meeting, 2023
2023
Multiscale CFD Modeling of an Area-Selective Atomic Layer Deposition Process: Application to Discrete Feeding Reactor Configuration Design
M Tom, H Wang, F Ou, G Orkoulas, P Christofides
2023 AIChE Annual Meeting, 2023
2023
Real-Time Feedback Control of an Atomic Layer Etching Spatial Reactor
F Ou, M Tom, H Wang, G Orkoulas, P Christofides
2023 AIChE Annual Meeting, 2023
2023
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