| A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage X Li, W Gao, H Muto, Y Shimizu, S Ito, S Dian Precision Engineering 37 (3), 771-781, 2013 | 183 | 2013 |
| A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement A Kimura, W Gao, WJ Kim, K Hosono, Y Shimizu, L Shi, L Zeng Precision engineering 36 (4), 576-585, 2012 | 140 | 2012 |
| A three-axis autocollimator for detection of angular error motions of a precision stage W Gao, Y Saito, H Muto, Y Arai, Y Shimizu CIRP annals 60 (1), 515-518, 2011 | 111 | 2011 |
| An insight into optical metrology in manufacturing Y Shimizu, LC Chen, DW Kim, X Chen, X Li, H Matsukuma Measurement Science and Technology 32 (4), 042003, 2021 | 85 | 2021 |
| Design and construction of the motion mechanism of an XY micro-stage for precision positioning Y Shimizu, Y Peng, J Kaneko, T Azuma, S Ito, W Gao, TF Lu Sensors and Actuators A: Physical 201, 395-406, 2013 | 70 | 2013 |
| Optical frequency domain angle measurement in a femtosecond laser autocollimator YL Chen, Y Shimizu, J Tamada, Y Kudo, S Madokoro, K Nakamura, ... Optics express 25 (14), 16725-16738, 2017 | 62 | 2017 |
| A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings X Li, W Gao, Y Shimizu, S Ito CIRP Annals 63 (1), 461-464, 2014 | 62 | 2014 |
| An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor YL Chen, S Wang, Y Shimizu, S Ito, W Gao, BF Ju Precision Engineering 39, 134-142, 2015 | 58 | 2015 |
| Contact/clearance sensor for HDI subnanometer regime J Xu, Y Shimizu, M Furukawa, J Li, Y Sano, T Shiramatsu, Y Aoki, ... IEEE Transactions on Magnetics 50 (3), 114-118, 2014 | 56 | 2014 |
| Nano-scale defect mapping on a magnetic disk surface using a contact sensor Y Shimizu, J Xu, H Kohira, M Kurita, T Shiramatsu, M Furukawa IEEE Transactions on Magnetics 47 (10), 3426-3432, 2011 | 53 | 2011 |
| Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions Y Shimizu, SL Tan, D Murata, T Maruyama, S Ito, YL Chen, W Gao Optics Express 24 (3), 2788-2805, 2016 | 52 | 2016 |
| Mode-locked laser autocollimator with an expanded measurement range YL Chen, Y Shimizu, Y Kudo, S Ito, W Gao Optics express 24 (14), 15554-15569, 2016 | 47 | 2016 |
| Laser interference lithography for fabrication of planar scale gratings for optical metrology Y Shimizu Nanomanufacturing and Metrology 4 (1), 3-27, 2021 | 46 | 2021 |
| Optical sensors for multi-axis angle and displacement measurement using grating reflectors Y Shimizu, H Matsukuma, W Gao Sensors 19 (23), 5289, 2019 | 46 | 2019 |
| Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite Y Shimizu, S Goto, JC Lee, S Ito, W Gao, S Adachi, K Omiya, H Sato, ... Precision Engineering 37 (3), 640-649, 2013 | 45 | 2013 |
| Precision tool setting for fabrication of a microstructure array W Gao, YL Chen, KW Lee, YJ Noh, Y Shimizu, S Ito CIRP Annals 62 (1), 523-526, 2013 | 45 | 2013 |
| Magnetic-recording head with first thermal fly-height control element and embedded contact sensor element configurable as second thermal fly-height control element M Kurita, T Shiramatsu, K Kuroki, Y Shimizu US Patent 8,773,801, 2014 | 43 | 2014 |
| Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo YL Chen, Y Cai, K Tohyama, Y Shimizu, S Ito, W Gao Precision Engineering 49, 253-261, 2017 | 42 | 2017 |
| Dynamically controlled thermal flying-height control slider T Shiramatsu, T Atsumi, M Kurita, Y Shimizu, H Tanaka IEEE Transactions on Magnetics 44 (11), 3695-3697, 2008 | 41 | 2008 |
| Laser autocollimation based on an optical frequency comb for absolute angular position measurement YL Chen, Y Shimizu, J Tamada, K Nakamura, H Matsukuma, X Chen, ... Precision Engineering 54, 284-293, 2018 | 37 | 2018 |
