| Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering S Watanabe, T Fujiu, T Fujii Applied Physics Letters 66 (12), 1481-1483, 1995 | 124 | 1995 |
| Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope T Fujii, S Watanabe, M Suzuki, T Fujiu Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1995 | 113 | 1995 |
| Micro‐fabricated piezoelectric cantilever for atomic force microscopy S Watanabe, T Fujii Review of scientific instruments 67 (11), 3898-3903, 1996 | 92 | 1996 |
| Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern T Fujii, S Watanabe Applied physics letters 68 (4), 467-468, 1996 | 67 | 1996 |
| Experimental study of forces between a tunnel tip and the graphite surface H Yamada, T Fujii, K Nakayama Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 6 (2 …, 1988 | 59 | 1988 |
| Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation Y Miyahara, M Deschler, T Fujii, S Watanabe, H Bleuler Applied surface science 188 (3-4), 450-455, 2002 | 57 | 2002 |
| Micropattern measurement with an atomic force microscope T Fujii, M Suzuki, M Miyashita, M Yamaguchi, T Onuki, H Nakamura, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1991 | 56 | 1991 |
| Scanning probe microscope having a cantilever used therein T Fujiu, S Watanabe, T Nomura, T Fujii, Y Sango US Patent 5,537,863, 1996 | 54 | 1996 |
| Lead zirconate titanate cantilever for noncontact atomic force microscopy Y Miyahara, T Fujii, S Watanabe, A Tonoli, S Carabelli, H Yamada, ... Applied surface science 140 (3-4), 428-431, 1999 | 49 | 1999 |
| Atomic force microscope using cantilever attached to optical microscope T Fujiu, S Watanabe, T Nomura, Y Sango, T Fujii, T Hattori US Patent 5,689,063, 1997 | 48 | 1997 |
| Piezoelectric vibration angular velocity meter and camera using the same S Watanabe, T Nomura, T Fujiu, Y Sango, T Fujii, T Hattori US Patent 5,765,046, 1998 | 46 | 1998 |
| Study on Wire-EDM: Accuracy in Taper-Cut N Kinoshita, M Fukui, T Fujii CIRP Annals - Manufacturing Technology 36 (1), 119, 1987 | 45 | 1987 |
| Portable phase measuring interferometer using Shack-Hartmann method T Fujii, J Kougo, Y Mizuno, H Ooki, M Hamatani Metrology, Inspection, and Process Control for Microlithography XVII 5038 …, 2003 | 40 | 2003 |
| Linewidth measurement by a new scanning tunneling microscope H Yamada, T Fujii, K Nakayama Japanese journal of applied physics 28 (11R), 2402, 1989 | 38 | 1989 |
| Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method J Yang, T Fujii, F Inoue US Patent 6,724,464, 2004 | 36 | 2004 |
| Scanning probe type microscope apparatus T Onuki, M Suzuki, T Fujii, H Matsushiro, H Ohkubo US Patent 5,508,517, 1996 | 34 | 1996 |
| Piezoelectric vibration angular velocity meter and camera using the same S Watanabe, T Nomura, T Fujiu, Y Sango, T Fujii, T Hattori US Patent 5,794,080, 1998 | 33 | 1998 |
| Integrated projecting optics tester for inspection of immersion ArF scanner T Fujii, K Suzuki, Y Mizuno, N Kita Metrology, Inspection, and Process Control for Microlithography XX 6152 …, 2006 | 31 | 2006 |
| Atomic force microscope under high speed feedback control S Watanabe, T Fujii US Patent 5,723,775, 1998 | 29 | 1998 |
| Multi-probe atomic force microscopy using piezoelectric cantilevers N Satoh, E Tsunemi, Y Miyato, K Kobayashi, S Watanabe, T Fujii, ... Japanese Journal of Applied Physics 46 (8S), 5543, 2007 | 27 | 2007 |
