| " Single chip"-Sensorarray zu Luftqualitätsmessung C Ament, ML Bauersfeld, A Kovacs, J Kritwattanakhorn, U Mescheder, ... Mikrosystemtechnik-Kongress 2005: 10. bis 12. Oktober 2005 in Freiburg, 2005 | | 2005 |
| „Distortion optimized Focusing Mirror Device with Large Aperture” U Mescheder, M Freudenreich, S Somogyi, C Estan in Sensors and Actuators A, 2005 | 2 | 2005 |
| “Hochschule Furtwangen University, IAF, Furtwangen, Germany S Keshavarzi, U Mescheder, H Reinecke, A Kovacs | | |
| 2-Achsen Si-Neigungssensor: Simulation und Realisierung U Mescheder, S Majer, R Keller Sensoren und Messysteme: Tagung Bad Nauheim, 11. bis 13. März 1996/VDI/VDE …, 1996 | 3 | 1996 |
| 3-d capacitive vibrational harvester for autonomous low power sensors A Nimo, U Mescheder Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, 49-52, 2010 | 6 | 2010 |
| 3-D Micro Free-Form Manufacturing in Silicon: Micro Free-Form Production for Plastics Moulding Technology R Huster, A Kovacs, U Mescheder Galvanotechnik 97 (2), 442-447, 2006 | 4 | 2006 |
| 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls A Nimo, U Mescheder, B Müller, AS Abou Elkeir Smart Sensors, Actuators, and MEMS V 8066, 531-544, 2011 | 8 | 2011 |
| 3D free forms in c-Si via grayscale lithography and RIE I Khazi, U Muthiah, U Mescheder Microelectronic Engineering 193, 34-40, 2018 | 28 | 2018 |
| 3D structuring of c-Si using porous silicon as sacrificial material UM Mescheder, A Kovacs, A Fahad, R Huster Proceedings of the 2nd IEEE Conference on Nanotechnology, 33-36, 2002 | 6 | 2002 |
| 3D Structuring of Silicon using Grayscale Technology U Muthiah, I Khazi, U Mescheder MikroSystemTechnik 2017; Congress, 1-4, 2017 | | 2017 |
| 3D Strukturierung von Silizium mittels Grauwert-Technologie U Muthiah, IM Khazi, U Mescheder MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23.–25 …, 2017 | | 2017 |
| 3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor U Mescheder, A Kovacs MikroSystemTechnik, 7-9, 2005 | | 2005 |
| A device for 3D energy harvesting A Nimo, U Mescheder, B Müller, AS Abou Elkeir SPIE Newsroom, 2011 | 3 | 2011 |
| A new micromachined optical fiber switch for instrumentation purposes M Herding, G Somogyi, U Mescheder, P Woias MEMS, MOEMS, and Micromachining 5455, 264-273, 2004 | 8 | 2004 |
| A novel miniaturized noise level dosimeter for investigation and prevention of human hearing loss L Becsi, T Bier, W Kronast, U Mescheder, D Benyoucef Sensors and Measuring Systems 2014; 17. ITG/GMA Symposium, 1-6, 2014 | 2 | 2014 |
| Active focusing device based on MOEMS technology U Mescheder, Z Torok, W Kronast MEMS, MOEMS, and Micromachining II 6186, 618601, 2006 | 8 | 2006 |
| Actuation concept for miniaturized tactile systems R Zhu, U Mescheder, F Lima BW-CAR| SINCOM, 44, 2014 | | 2014 |
| Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle U Mescheder, A Kovacs, W Kronast, B Müller, A Ivanov | 1 | 2015 |
| Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon F Lima, H Reinecke, U Mescheder MEMS, Mikroelektronik, Systeme: proceedings; MikroSystemTechnik Kongress …, 2015 | 1 | 2015 |
| Aktorik in der Mikrosystemtechnik U Mescheder, U Mescheder Mikrosystemtechnik: Konzepte und Anwendungen, 121-174, 2004 | | 2004 |
