| A dry wafer-reconstitution process with zero insertion force by embedded alignment guide tabs JWP Chen, J Provine, N Klejwa, RT Howe Journal of Micromechanics and Microengineering 22 (6), 065007, 2012 | 1 | 2012 |
| A method for wafer-scale encapsulation of large lateral deflection MEMS devices AB Graham, MW Messana, PG Hartwell, J Provine, S Yoneoka, ... Journal of microelectromechanical systems 19 (1), 28-37, 2009 | 42 | 2009 |
| A photonic crystal cavity-optical fiber tip nanoparticle sensor for biomedical applications G Shambat, S Rajasekhar Kothapalli, A Khurana, J Provine, T Sarmiento, ... Applied Physics Letters 100 (21), 2012 | 40 | 2012 |
| ALD HfO2 Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications C Chia, MM Shulaker, J Provine, SS Jeffrey, RT Howe ACS applied materials & interfaces 11 (29), 26082-26092, 2019 | 7 | 2019 |
| ALD-metal uncooled bolometer S Yoneoka, M Liger, G Yama, R Schuster, F Purkl, J Provine, FB Prinz, ... 2011 IEEE 24th international conference on micro electro mechanical systems …, 2011 | 46 | 2011 |
| Alternative smoothing techniques to mitigate EUV substrate defectivity R Teki, AJ Kadaksham, M House, J Harris-Jones, A Ma, SV Babu, ... Extreme Ultraviolet (EUV) Lithography III 8322, 91-102, 2012 | 16 | 2012 |
| Application of principal component analysis to a full profile correlative analysis of FTIR spectra SR Broderick, C Suh, J Provine, CS Roper, R Maboudian, RT Howe, ... Surface and interface analysis 44 (3), 365-371, 2012 | 13 | 2012 |
| Approaching the Limits of Aspect Ratio in Free‐Standing Al2O3 3D Shell Structures S Burgmann, M Lid, S Chaikasetsin, DS Bjordal, F Prinz, J Provine, ... Advanced Engineering Materials 24 (10), 2200444, 2022 | 2 | 2022 |
| ATOMIC LAYER DEPOSITED ETCH STOP LAYERS FOR HYDROFLUORIC ACID MM Winterkorn, A Dadlani, Y Kim, TS English, KL Harrison, J Provine, ... 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 133-136, 2016 | 4 | 2016 |
| Atomic Layer Deposited Platinum as a Sensor Material: Uniformity, 1/f Noise, and Young’s Modulus T English, F Purkl, A Daus, J Provine, Y Won, G Yama, A Feyh, G O’Brien, ... | 1 | 2014 |
| Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors J Provine, P Schindler, J Torgersen, HJ Kim, HP Karnthaler, FB Prinz Journal of Vacuum Science & Technology A 34 (1), 2016 | 31 | 2016 |
| Atomic Layer Deposition of Zinc Oxide P Ramesh, J Zhao, J Provine, M Rincon Basic Solid State Physics 257 (2), 2014 | 4 | 2014 |
| Atomic layer deposition with passivation treatment FB Prinz, S Xu, T English, J Provine, D Thian, J Torgersen US Patent 11,834,741, 2023 | 1 | 2023 |
| Atomically flat silicon oxide monolayer generated by remote plasma D Thian, YT Yemane, M Logar, S Xu, P Schindler, MM Winterkorn, ... The Journal of Physical Chemistry C 120 (15), 8148-8156, 2016 | 3 | 2016 |
| Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect KL Harrison, WA Clary, J Provine, RT Howe Microsystem Technologies 23, 2125-2130, 2017 | 4 | 2017 |
| Boosting Qs of AlN resonators by redefining acoustic boundaries A Gao, M Winterkorn, Y Yang, R Lu, J Provine, S Gong 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 16 | 2019 |
| Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change CF Chiang, AB Graham, MW Messana, J Provine, DT Buchman, ... 2011 16th international solid-state sensors, actuators and microsystems …, 2011 | 6 | 2011 |
| Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC S Yoneoka, CS Roper, RN Candler, SA Chandorkar, AB Graham, ... Journal of Microelectromechanical Systems 19 (2), 357-366, 2010 | 33 | 2010 |
| Characterization of metal-nitride films deposited by the Savannah ALD system A Gerke, S Kumar, J Provine, K Saraswat Stanford University, 0 | 13 | |
| Characterization of switching parameters and multilevel capability in HfOx/AlOx bi-layer RRAM devices S Yu, Y Wu, Y Chai, J Provine, HSP Wong Proceedings of 2011 International Symposium on VLSI Technology, Systems and …, 2011 | 68 | 2011 |
