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Sangwoo Lee
Sangwoo Lee
Shinsung SoundMotion
在 shinsungsm.com 的电子邮件经过验证
标题
引用次数
引用次数
年份
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
S Lee, S Park, DI Cho
Journal of Microelectromechanical Systems 8 (4), 409-416, 1999
1751999
Surface/bulk micromachined single-crystalline-silicon micro-gyroscope
S Lee, S Park, J Kim, S Lee, DI Cho
Journal of Microelectromechanical Systems 9 (4), 557-567, 2000
1532000
Isolation in micromachined single crystal silicon using deep trench insulation
DI Cho, S Lee, S Park, S Lee
US Patent 6,472,290, 2002
462002
Surface/bulk micromachining (SBM) process and deep trench oxide isolation method for MEMS
S Lee, S Park, D Cho, Y Oh
International Electron Devices Meeting 1999. Technical Digest (Cat. No …, 1999
341999
The effects of post-deposition processes on polysilicon Young's modulus
S Lee, C Cho, J Kim, S Park, S Yi, J Kim, DD Cho
Journal of micromechanics and microengineering 8 (4), 330, 1998
341998
Mesa-supported, single-crystal microstructures fabricated by the surface/bulk micromachining process
SPS Park, SLS Lee, SYS Yi, DDC Dong-il, D Cho
Japanese journal of applied physics 38 (7R), 4244, 1999
261999
A new micromachining technique with (111) silicon
S Lee, S Park, D Cho
Japanese journal of applied physics 38 (5R), 2699, 1999
261999
Triple layer isolation for silicon microstructure and structures formed using the same
DI Cho, S Lee, S Park
US Patent 6,569,702, 2003
232003
Surface/bulk micromachined high performance silicon micro-gyroscope
D Cho, S Lee, S Park
2000 Solid-state Sensor and Actuator Workshop (Hilton Head), 2000
212000
Honeycomb-shaped deep-trench oxide posts combined with the SBM technology for micromachining single-crystal silicon without using SOI
SC Lee, S Park, DD Cho
Sensors and Actuators A: Physical 97, 734-738, 2002
142002
Micromechanical system fabrication method using (111) single crystalline silicon
DI Cho, S Lee, S Park
US Patent 6,150,275, 2000
132000
Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators
S Lee, S Park, S Yi, S Lee, DIID Cho, B Ha, Y Oh, C Song
Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and …, 1999
111999
Micromechanical system fabrication method using (111) single crystalline silicon
DI Cho, S Lee, S Park
US Patent 6,689,694, 2004
32004
Dry and wet etching with (111) silicon for high-performance micro and nano systems
DIL " DAN" CHO, BD Choi, S Lee, SJ PAIK, S Park, J Park, Y Park, J Kim, ...
International Journal of Computational Engineering Science 4 (02), 181-187, 2003
22003
Tactical Grade MEMS Gyroscopes Fabricated by the SBM Process
D Dan Cho, S Park, J Kim, S Lee, SW Lee
Materials & Process Integration for MEMS, 257-272, 2002
2002
A New Micromachining Technology Using
S Lee, S Park, D Cho
Digest of Papers. Microprocesses and Nanotechnology'98. 198 International …, 1998
1998
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