Near vacuum gas damping in MEMS: Simplified modeling P Fedeli, A Frangi, G Laghi, G Langfelder, G Gattere Journal of Microelectromechanical Systems 26 (3), 632-642, 2017 | 36 | 2017 |
Analysis of frequency stability and thermoelastic effects for slotted tuning fork MEMS resonators V Zega, A Frangi, A Guercilena, G Gattere Sensors 18 (7), 2157, 2018 | 32 | 2018 |
Near vacuum gas damping in MEMS: numerical modeling and experimental validation A Frangi, P Fedeli, G Laghi, G Langfelder, G Gattere Journal of Microelectromechanical Systems 25 (5), 890-899, 2016 | 25 | 2016 |
Numerical modelling of non-linearities in MEMS resonators V Zega, G Gattere, S Koppaka, A Alter, GD Vukasin, A Frangi, TW Kenny Journal of Microelectromechanical Systems 29 (6), 1443-1454, 2020 | 24 | 2020 |
Monolithic 3-axis MEMS multi-loop magnetometer: A performance analysis CR Marra, M Gadola, G Laghi, G Gattere, G Langfelder Journal of Microelectromechanical Systems 27 (4), 748-758, 2018 | 17 | 2018 |
A MEMS real-time clock with single-temperature calibration and deterministic jitter cancellation G Mussi, P Frigerio, G Gattere, G Langfelder IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 68 …, 2020 | 13 | 2020 |
Resonators for real-time clocks based on epitaxial polysilicon process: A feasibility study on system-level compensation of temperature drifts G Mussi, M Bestetti, V Zega, A Frangi, G Gattere, G Langfelder 2018 IEEE Micro Electro Mechanical Systems (MEMS), 711-714, 2018 | 12 | 2018 |
Modelling cross axis sensitivity in MEMS coriolis vibratory gyroscopes L Guerinoni, LG Falorni, G Gattere Proceedings 1 (4), 281, 2017 | 12 | 2017 |
Thelma-Double: a new technology platform for manufacturing of high-performance MEMS inertial sensors F Vercesi, L Corso, G Allegato, G Gattere, L Guerinoni, C Valzasina, ... 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 10 | 2022 |
Thermal stability of DETF MEMS resonators: Numerical modelling and experimental validation V Zega, A Opreni, G Mussi, HK Kwon, G Vukasin, G Gattere, G Langfelder, ... 2020 IEEE 33rd international conference on micro electro mechanical systems …, 2020 | 10 | 2020 |
Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters G Gattere, C Valzasina, LG Falorni US Patent 10,480,942, 2019 | 10 | 2019 |
Experimental investigation of MEMS DRIE etching dimensional loss G Gattere, F Rizzini, L Corso, A Alessandri, F Tripodi, I Gelmi 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2018 | 9 | 2018 |
A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching M Izadi, F Braghin, D Giannini, D Milani, F Resta, MF Brunetto, LG Falorni, ... 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2018 | 9 | 2018 |
100 nT/√Hz, 0.5 mm2monolithic, multi-loop low-power 3-axis MEMS magnetometer CR Marra, G Laghi, M Gadola, G Gattere, D Paci, A Tocchio, G Langfelder 2018 IEEE Micro Electro Mechanical Systems (MEMS), 101-104, 2018 | 9 | 2018 |
Microelectromechanical resonator with improved electrical features G Gattere, A Tocchio, C Valzasina US Patent 10,501,310, 2019 | 7 | 2019 |
Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features G Gattere, LG Falorni, C Valzasina US Patent 10,458,794, 2019 | 7 | 2019 |
Chipping and wearing in MEMS inertial sensors: Effects on stability and predictive analysis through test structures LG Pagani, L Guerinoni, L Falorni, G Gattere, G Mogavero, A Ghisi, ... 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2020 | 6 | 2020 |
An outlook on potentialities and limits in using epitaxial polysilicon for MEMS real-time clocks G Mussi, M Bestetti, V Zega, AA Frangi, G Gattere, G Langfelder IEEE Transactions on Industrial Electronics 67 (8), 6996-7004, 2019 | 6 | 2019 |
Comprehensive modelling and experimental verification of air damping coefficients in MEMS of complex geometry G Laghi, AA Frangi, P Fedeli, G Gattere, G Langfelder 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 6 | 2016 |
ON-MEMS-CHIP compact temperature sensor for large-volume, low-cost sensor calibration P Frigerio, A Fagnani, V Zega, G Gattere, A Frangi, G Langfelder 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 5 | 2023 |