受强制性开放获取政策约束的文章 - Denis Shamiryan了解详情
可在其他位置公开访问的文章：2 篇
Impact of metal etch residues on etch species density and uniformity
D Dictus, D Shamiryan, V Paraschiv, W Boullart, S De Gendt, C Vinckier
Journal of Vacuum Science & Technology B 28 (4), 789-794, 2010
强制性开放获取政策： Research Foundation (Flanders)
Simultaneous Etching and Deposition Processes during the Etching of Silicon with a Cl2/O2/Ar Inductively Coupled Plasma
S Tinck, A Bogaerts, D Shamiryan
Plasma Processes and Polymers 8 (6), 490-499, 2011
强制性开放获取政策： Research Foundation (Flanders)
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