| Surface micromachined AlN thin film 2 GHz resonator for CMOS integration M Hara, J Kuypers, T Abe, M Esashi Sensors and Actuators A: Physical 117 (2), 211-216, 2005 | 74 | 2005 |
| Super-high-frequency band filters configured with air-gap-type thin-film bulk acoustic resonators M Hara, T Yokoyama, T Sakashita, S Taniguchi, M Iwaki, T Nishihara, ... Japanese journal of applied physics 49 (7S), 07HD13, 2010 | 73 | 2010 |
| Development of an X-band filter using air-gap-type film bulk acoustic resonators M Ueda, M Hara, S Taniguchi, T Yokoyama, T Nishihara, K Hashimoto, ... Japanese journal of applied physics 47 (5S), 4007, 2008 | 69 | 2008 |
| Acoustic wave device, duplexer, communication module, and communication apparatus M Ueda, M Hara, S Inoue, K Hashimoto, Y Tanaka, M Yamaguchi, ... US Patent 8,026,776, 2011 | 63 | 2011 |
| Piezoelectric thin-film resonator, filter using the same, and duplexer using the same T Nishihara, M Hara, S Taniguchi, T Sakashita, T Yokoyama, M Iwaki, ... US Patent 8,084,919, 2011 | 58 | 2011 |
| Bulk micromachined energy harvesters employing (K, Na) NbO3 thin film M Hara, F Horikiri, K Shibata, T Mishima, H Kuwano Journal of Micromechanics and Microengineering 23 (3), 035029, 2013 | 47 | 2013 |
| Piezoelectric thin-film resonator and filter using the same M Hara, T Nishihara, M Ueda, G Endo US Patent 7,602,101, 2009 | 46 | 2009 |
| K-band ladder filters employing air-gap type thin film bulk acoustic resonators T Yokoyama, M Hara, M Ueda, Y Satoh 2008 IEEE Ultrasonics Symposium, 598-601, 2008 | 46 | 2008 |
| Acoustic wave device, method of manufacturing acoustic wave device and transmission apparatus M Hara, T Nishihara, S Taniguchi, T Sakashita, T Yokoyama, M Iwaki, ... US Patent 8,723,623, 2014 | 38 | 2014 |
| Ferroelectric dipole electrets for output power enhancement in electrostatic vibration energy harvesters H Asanuma, H Oguchi, M Hara, R Yoshida, H Kuwano Applied Physics Letters 103 (16), 2013 | 38 | 2013 |
| 12E-2 X-band filters utilizing AlN thin film bulk acoustic resonators M Hara, T Yokoyama, M Ueda, Y Satoh 2007 IEEE Ultrasonics Symposium Proceedings, 1152-1155, 2007 | 38 | 2007 |
| Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence] M Hara, T Yokoyama, T Nishihara, M Ueda, H Kuwano IEEE transactions on ultrasonics, ferroelectrics, and frequency control 62 …, 2015 | 35* | 2015 |
| A study of the thin film bulk acoustic resonator filters in several ten GHz band M Hara, T Yokoyama, T Sakashita, M Ueda, Y Satoh 2009 IEEE International Ultrasonics Symposium, 851-854, 2009 | 34 | 2009 |
| Filter, branching filter and communication apparatus M Hara, S Inoue, J Tsutsumi, T Matsuda, M Ueda US Patent 8,138,854, 2012 | 33 | 2012 |
| Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock M Hara, Y Yano, M Kajita, H Nishino, Y Ibata, M Toda, S Hara, ... Review of Scientific Instruments 89 (10), 2018 | 30 | 2018 |
| Current sensors using Fe–B–Nd–Nb magnetic metallic glass micro-cantilevers TA Phan, M Hara, H Oguchi, H Kuwano Microelectronic Engineering 135, 28-31, 2015 | 30 | 2015 |
| Acoustic wave filter, duplexer using the acoustic wave filter, and communication apparatus using the duplexer M Hara, T Nishihara, S Taniguchi, T Sakashita, T Yokoyama, M Iwaki, ... US Patent 8,125,298, 2012 | 30 | 2012 |
| A nonlinear elastic model for predicting triple beat in SAW duplexers S Inoue, M Hara, M Iwaki, J Tsutsumi, H Nakamura, M Ueda, Y Satoh, ... 2011 IEEE International Ultrasonics Symposium, 1837-1841, 2011 | 28 | 2011 |
| MEMS based thin film 2 GHz resonator for CMOS integration M Hara, J Kuypers, T Abe, M Esashi IEEE MTT-S International Microwave Symposium Digest, 2003 3, 1797-1800, 2003 | 28 | 2003 |
| Correlation between temperature coefficient of elasticity and Fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices S Matsuda, M Hara, M Miura, T Matsuda, M Ueda, Y Satoh, K Hashimoto IEEE transactions on ultrasonics, ferroelectrics, and frequency control 58 …, 2011 | 26 | 2011 |
