| Measurement technologies for precision positioning W Gao, SW Kim, H Bosse, H Haitjema, YL Chen, XD Lu, W Knapp, ... CIRP annals 64 (2), 773-796, 2015 | 590 | 2015 |
| The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters BF Ju, YL Chen, Y Ge Review of Scientific Instruments 82 (1), 2011 | 140 | 2011 |
| Optical frequency domain angle measurement in a femtosecond laser autocollimator YL Chen, Y Shimizu, J Tamada, Y Kudo, S Madokoro, K Nakamura, ... Optics Express 25 (14), 16725-16738, 2017 | 66 | 2017 |
| An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor YL Chen, S Wang, Y Shimizu, S Ito, W Gao, BF Ju Precision Engineering 39, 134-142, 2015 | 61 | 2015 |
| Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions Y Shimizu, SL Tan, D Murata, T Maruyama, S Ito, YL Chen, W Gao Optics Express 24 (3), 2788-2805, 2016 | 56 | 2016 |
| Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe BF Ju, YL Chen, M Fu, Y Chen, Y Yang Sensors and Actuators A: Physical 155 (1), 136-144, 2009 | 54 | 2009 |
| Precision tool setting for fabrication of a microstructure array W Gao, YL Chen, KW Lee, YJ Noh, Y Shimizu, S Ito CIRP annals 62 (1), 523-526, 2013 | 51 | 2013 |
| Mode-locked laser autocollimator with an expanded measurement range YL Chen, Y Shimizu, Y Kudo, S Ito, W Gao Optics express 24 (14), 15554-15569, 2016 | 50 | 2016 |
| Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo YL Chen, Y Cai, K Tohyama, Y Shimizu, S Ito, W Gao Precision Engineering 49, 253-261, 2017 | 46 | 2017 |
| Laser autocollimation based on an optical frequency comb for absolute angular position measurement YL Chen, Y Shimizu, J Tamada, K Nakamura, H Matsukuma, X Chen, ... Precision Engineering 54, 284-293, 2018 | 42 | 2018 |
| On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju Precision Engineering 43, 462-467, 2016 | 38 | 2016 |
| Surface form metrology of micro-optics B Xu, Z Jia, X Li, YL Chen, Y Shimizu, S Ito, W Gao International Conference on Optics in Precision Engineering and …, 2013 | 37 | 2013 |
| Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju Journal of Micromechanics and Microengineering 26 (2), 025002, 2015 | 36 | 2015 |
| A chromatic confocal probe with a mode-locked femtosecond laser source X Chen, T Nakamura, Y Shimizu, C Chen, YL Chen, H Matsukuma, ... Optics & Laser Technology 103, 359-366, 2018 | 35 | 2018 |
| An optical lever by using a mode-locked laser for angle measurement Y Shimizu, Y Kudo, YL Chen, S Ito, W Gao Precision Engineering 47, 72-80, 2017 | 35 | 2017 |
| An edge reversal method for precision measurement of cutting edge radius of single point diamond tools YL Chen, Y Cai, M Xu, Y Shimizu, S Ito, W Gao Precision Engineering 50, 380-387, 2017 | 29 | 2017 |
| A stitching linear-scan method for roundness measurement of small cylinders YL Chen, Y Machida, Y Shimizu, H Matsukuma, W Gao CIRP annals 67 (1), 535-538, 2018 | 27 | 2018 |
| Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer Y Shimizu, R Aihara, Z Ren, YL Chen, S Ito, W Gao Optics Express 24 (24), 27521-27535, 2016 | 26 | 2016 |
| Rapid measurement of a high step microstructure with 90 steep sidewall BF Ju, YL Chen, W Zhang, FZ Fang Review of Scientific Instruments 83 (1), 2012 | 25 | 2012 |
| Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings Y Shimizu, R Aihara, K Mano, C Chen, YL Chen, X Chen, W Gao Precision Engineering 52, 138-151, 2018 | 24 | 2018 |
