受强制性开放获取政策约束的文章 - Sergiu Langa了解详情
无法在其他位置公开访问的文章:6 篇
Audio-Transducer for In-Ear-Applications based on CMOS-compatible electrostatic actuators
B Spitz, F Wall, H Schenk, A Melnikov, L Ehrig, S Langa, M Stolz, B Kaiser, ...
MikroSystemTechnik 2019; Congress, 1-4, 2019
强制性开放获取政策: Fraunhofer-Gesellschaft
A contribution to the expansion of the applicability of electrostatic forces in micro transducers
H Schenk, H Conrad, M Gaudet, S Uhlig, B Kaiser, S Langa, M Stolz, ...
MOEMS and Miniaturized Systems XVI 10116, 2-9, 2017
强制性开放获取政策: Federal Ministry of Education and Research, Germany
Acoustic validation of electrostatic all-silicon MEMS-speakers
L Ehrig, B Kaiser, HAG Schenk, M Stolz, S Langa, H Conrad, H Schenk, ...
Audio Engineering Society Conference: 2019 AES International Conference on …, 2019
强制性开放获取政策: Federal Ministry of Education and Research, Germany
Technological aspects of a new micro-electro-mechanical actuation principle: Nano-e-drive
S Langa, H Conrad, B Kaiser, M Stolz, M Gaudet, S Uhlig, K Schimmanz, ...
Microsystem Technologies 23, 5697-5708, 2017
强制性开放获取政策: Federal Ministry of Education and Research, Germany
Wafer level vacuum packaging of micro-mirrors with buried signal lines
S Langa, C Drabe, A Herrmann, T Ludewig, A Rieck, A Flemming, ...
Microsystem Technologies 21, 1021-1028, 2015
强制性开放获取政策: Fraunhofer-Gesellschaft
Enhancement of vertical integration density by engineered BSOI wafers
C Kaden, S Langa, T Ludewig, A Schönberger, A Herrmann, A Göbel, ...
Microsystem Technologies 24, 809-814, 2018
强制性开放获取政策: Fraunhofer-Gesellschaft
可在其他位置公开访问的文章:7 篇
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
B Kaiser, S Langa, L Ehrig, M Stolz, H Schenk, H Conrad, H Schenk, ...
Microsystems & nanoengineering 5 (1), 43, 2019
强制性开放获取政策: Federal Ministry of Education and Research, Germany
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
B Kaiser, HAG Schenk, L Ehrig, F Wall, JM Monsalve, S Langa, M Stolz, ...
Microsystems & nanoengineering 8 (1), 125, 2022
强制性开放获取政策: Fraunhofer-Gesellschaft
Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation
A Melnikov, HAG Schenk, JM Monsalve, F Wall, M Stolz, A Mrosk, ...
Microsystems & nanoengineering 7 (1), 41, 2021
强制性开放获取政策: Fraunhofer-Gesellschaft
Electrochemical pore etching in Ge–An overview
C Fang, H Föll, J Carstensen, S Langa
Physica status solidi (a) 204 (5), 1292-1296, 2007
强制性开放获取政策: German Research Foundation
Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion
JM Monsalve, A Melnikov, M Stolz, A Mrosk, M Jongmanns, F Wall, ...
Sensors and Actuators A: Physical 345, 113813, 2022
强制性开放获取政策: Fraunhofer-Gesellschaft
First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition
JMM Guaracao, M Kircher, F Wall, M Krenkel, B Kaiser, S Langa, ...
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
强制性开放获取政策: Fraunhofer-Gesellschaft
applications and materials science
C Fang, H Föll, J Carstensen, S Langa
phys. stat. sol.(a) 204 (5), 1292-1296, 2007
强制性开放获取政策: German Research Foundation
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