| Large-scale optical traps on a chip for optical sorting YY Sun, XC Yuan, LS Ong, J Bu, SW Zhu, R Liu Applied physics letters 90 (3), 2007 | 75 | 2007 |
| Real-time vibration measurement technique based on tip-timing for rotating blades F Duan, Z Fang, Y Sun, S Ye Opto-Electronic Engineering 30 (1), 29-31, 2005 | 46* | 2005 |
| Composite-microlens-array-enabled microfluidic sorting YY Sun, LS Ong, XC Yuan Applied physics letters 89 (14), 2006 | 35 | 2006 |
| Simultaneous optical trapping of microparticles in multiple planes by a modified self-imaging effect on a chip YY Sun, J Bu, LS Ong, XC Yuan Applied Physics Letters 91 (5), 2007 | 28 | 2007 |
| Microlens-array-enabled on-chip optical trapping and sorting X Zhao, Y Sun, J Bu, S Zhu, XC Yuan Applied optics 50 (3), 318-322, 2011 | 23 | 2011 |
| Lithographic benefits and mask manufacturability study of curvilinear masks VW Guo, F Jiang, J Rankin, I Bork, A Tritchkov, A Wei, Y Sun, S Jayaram, ... Photomask Technology 2018 10810, 106-118, 2018 | 21 | 2018 |
| Optimizing OPC data sampling based on" orthogonal vector space" Y Sun, YM Foong, Y Wang, J Cheng, D Zhang, S Gao, N Chen, BI Choi, ... Optical Microlithography XXIV 7973, 867-876, 2011 | 21 | 2011 |
| Multiple patterning process for forming trenches or holes using stitched assist features Y Sun, NS Chen, J Liu US Patent 8,782,571, 2014 | 20 | 2014 |
| Influence of geometric shape of optically trapped particles on the optical rotation induced by vortex beams SH Tao, XC Yuan, J Lin, YY Sun Journal of applied physics 100 (4), 2006 | 19 | 2006 |
| Machine learning based wafer defect detection Y Ma, F Wang, Q Xie, L Hong, J Mellmann, Y Sun, SW Gao, S Singh, ... Design-Process-Technology Co-optimization for Manufacturability XIII 10962 …, 2019 | 18 | 2019 |
| Selective generation of high-order optical vortices from a single phase wedge J Lin, XC Yuan, J Bu, BPS Ahluwalia, YY Sun, RE Burge Optics letters 32 (20), 2927-2929, 2007 | 18 | 2007 |
| Subresolution assist features impact and implementation in extreme ultraviolet lithography for next-generation beyond 7-nm node VW Guo, F Jiang, A Tritchkov, S Jayaram, S Mansfield, L Zhuang, Y Sun, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (1), 011003-011003, 2019 | 11 | 2019 |
| Optimization of computer-generated holograms for dynamic optical manipulation with uniform structured light spots J Bu, G Yuan, Y Sun, S Zhu, X Yuan Chinese Optics Letters 9 (6), 061202, 2011 | 8 | 2011 |
| 非接触式叶片振测系统的叶尖定时传感器的研究 方志强， 段发阶， 孙宇扬， 赵行明 计量学报 24 (2), 119-121, 2003 | 7 | 2003 |
| 一种新型叶尖定时信号高精度处理技术 孙宇扬， 段发阶， 方志强， 叶声华 传感技术学报 16 (4), 415-418, 2003 | 7 | 2003 |
| SRAF requirements, relevance, and impact on EUV lithography for next-generation beyond 7nm node VW Guo, F Jiang, A Tritchkov, S Jayaram, S Mansfield, L Zhuang, Y Sun, ... Extreme Ultraviolet (EUV) Lithography IX 10583, 149-160, 2018 | 6 | 2018 |
| Design technology co-optimization (DTCO) study on self-aligned-Via (SAV) with lamella DSA for sub-7 nm technology Y Ma, J Kye, GS Khaira, L Hong, J Word, Y Sun, J Mitra, JA Torres, ... Design-Process-Technology Co-optimization for Manufacturability XI 10148, 74-85, 2017 | 6 | 2017 |
| Retargeting semiconductor device shapes for multiple patterning processes Y Sun, C Kallingal, N Chen US Patent 9,064,086, 2015 | 6 | 2015 |
| Locally optimized coloring for cleaning lithographic hotspots Y Sun, C Kallingal, M Tarabbia US Patent 8,869,075, 2014 | 6 | 2014 |
| Fabrication of three-dimensional photonic crystals with the Talbot self-imaging effect XC Yuan, DG Zhang, YY Sun, J Bu, SW Zhu Journal of Optics A: Pure and Applied Optics 11 (10), 105104, 2009 | 6 | 2009 |
