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Investigation of wet etching technique for selective patterning of ferroelectric zirconium-doped hafnium oxide thin films for high-frequency electronic applications
LA Dinu, C Romanitan, M Aldrigo, C Parvulescu, F Nastase, S Vulpe, ...
Materials & Design 233, 112194, 2023
强制性开放获取政策： European Commission
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