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Kevin Ryan
Kevin Ryan
Tokyo Electron
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标题
引用次数
引用次数
年份
Properties of PEG, PPG and their copolymers: influence on copper filling of damascene interconnects
K Ryan, K Dunn, J van Eisden, J Adolf
Journal of The Electrochemical Society 160 (12), D3186, 2013
302013
Development of electrochemical copper deposition screening methodologies for next generation additive selection
K Ryan, K Dunn, J van Eisden
Microelectronic engineering 92, 91-94, 2012
102012
3D CMOL Crossnet for Neuromorphic Network Applications
K Ryan, S Tanachutiwat, W Wang
Nano-Net: Third International ICST Conference, NanoNet 2008, Boston, MA, USA …, 2009
42009
Development of electrochemical copper deposition screening methodologies for next generation additive selection
K Ryan, K Dunn, J van Eisden
MRS Online Proceedings Library (OPL) 1335, mrss11-1335-o09-27, 2011
12011
Influence of Polyalkyl Glycol Polymers On Copper Filling of Damascene Interconnects
K Ryan, KA Dunn, J van Eisden, JD Adolf
ECS Meeting Abstracts, 2386, 2013
2013
Properties of PEG, PPG and their copolymers influence on the gap-fill characteristics of damascene interconnects
KJ Ryan
State University of New York at Albany, 2013
2013
Effects of Suppressor Properties on the Gap-Fill Process in Damascene Interconnects
K Ryan, K Dunn, J van Eisden, J Adolf
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