Atomic layer deposition of InN using trimethylindium and ammonia plasma P Deminskyi, P Rouf, IG Ivanov, H Pedersen Journal of Vacuum Science & Technology A 37 (2), 2019 | 43 | 2019 |
Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: a case study for metal oxides A Haider, P Deminskyi, TM Khan, H Eren, N Biyikli The Journal of Physical Chemistry C 120 (46), 26393-26401, 2016 | 42 | 2016 |
Nanoscale selective area atomic layer deposition of TiO2 using e-beam patterned polymers HENB Ali Haider, Mehmet Yilmaz, Petro Deminskyi RSC Adv. 6, 106109-106119, 2016 | 40 | 2016 |
NLL-assisted multilayer graphene patterning E Kovalska, I Pavlov, P Deminskyi, A Baldycheva, FO Ilday, C Kocabas ACS omega 3 (2), 1546-1554, 2018 | 18 | 2018 |
Self-aligned nanoscale processing solutions via selective atomic layer deposition of oxide, nitride, and metallic films N Biyikli, A Haider, P Deminskyi, M Yilmaz Low-Dimensional Materials and Devices 2017 10349, 30-49, 2017 | 18 | 2017 |
Direct epitaxial nanometer-thin InN of high structural quality on 4H–SiC by atomic layer deposition CW Hsu, P Deminskyi, I Martinovic, IG Ivanov, J Palisaitis, H Pedersen Applied Physics Letters 117 (9), 2020 | 13 | 2020 |
Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition A Haider, P Deminskyi, M Yilmaz, K Elmabruk, I Yilmaz, N Biyikli Journal of Materials Chemistry C 6 (24), 6471-6482, 2018 | 12 | 2018 |
On the dynamics in chemical vapor deposition of InN CW Hsu, P Deminskyi, A Persson, M Karlsson, H Pedersen Journal of Applied Physics 130 (13), 2021 | 8 | 2021 |
Surface ligand removal in atomic layer deposition of GaN using triethylgallium P Deminskyi, CW Hsu, B Bakhit, P Rouf, H Pedersen Journal of Vacuum Science & Technology A 39 (1), 2021 | 7 | 2021 |
Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design SC Buttera, P Rouf, P Deminskyi, NJ O’Brien, H Pedersen, ST Barry Inorganic Chemistry 60 (15), 11025-11031, 2021 | 6 | 2021 |
Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli Journal of Vacuum Science & Technology A 39 (2), 2021 | 4 | 2021 |
Graphene as plasma-compatible blocking layer material for area-selective atomic layer deposition: A feasibility study for III-nitrides P Deminskyi, A Haider, E Kovalska, N Biyikli Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36 (1 …, 2018 | 4 | 2018 |
Photoluminescence spectrums of GaN/InGaN MQDs on GaN nanoroads OL P. Deminskyi, V. Osinsky, N. Lyahova, V. Hlotov, N. Sukhovyy Uchionnye zapiski fizicheskogo fakulteta MGU, 142304, 2014 | 4* | 2014 |
Laser writing of nanostructures deep inside Gallium Arsenide (GaAs) O Tokel, A Turnali, P Deminskyi, S Ilday, FÖ Ilday Conference on Lasers and Electro-Optics/Pacific Rim, W1E. 2, 2018 | 3 | 2018 |
Investigation of native oxide removing from HCPA ALD grown GaN thin films surface utilizing HF solutions P Deminskyi, A Haider, N Biyikli, A Ovsianitsky, A Tsymbalenko, D Kotov, ... 2016 IEEE 36th International Conference on Electronics and Nanotechnology …, 2016 | 3 | 2016 |
Molybdenum nitride as a scalable and thermally stable pWFM for CFET H Arimura, S Brus, J Franco, Y Oniki, A Vandooren, T Conard, BT Chan, ... 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and …, 2023 | 2 | 2023 |
Atomic layer deposition of AlN on different SiC surfaces M Beshkova, P Deminskyi, CW Hsu, I Shtepliuk, I Avramova, R Yakimova, ... Journal of Physics: Conference Series 2240 (1), 012004, 2022 | 2 | 2022 |
Low-Dimensional Materials and Devices 2017 N Biyikli, A Haider, P Deminskyi, M Yilmaz, NP Kobayashi, AA Talin, ... International Society for Optics and Photonics, 103490M, 2017 | 2 | 2017 |
Effect of substrate temperature and Ga source precursor on growth and material properties of GaN grown by hollow cathode plasma assisted atomic layer deposition A Haider, S Kizir, P Deminskyi, O Tsymbalenko, SA Leghari, N Biyikli, ... 2016 IEEE 36th International Conference on Electronics and Nanotechnology …, 2016 | 2 | 2016 |
Carbides of A³B⁵ compounds–new class materials for opto-and microelectronics VI Osinsky, IV Masol, NN Lyahova, PV Deminsky Semiconductor Physics Quantum Electronics & Optoelectronics, 2012 | 2 | 2012 |