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YOUNGMIN PARK
YOUNGMIN PARK
Samsung Electronics & Electonics Engineering, Control Engineering, Chung-Ang University
在 cau.ac.kr 的电子邮件经过验证 - 首页
标题
引用次数
引用次数
年份
Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor
D Sung, S Jeong, Y Park, VN Volynets, AG Ushakov, GH Kim
Journal of Vacuum Science & Technology A 27 (1), 13-19, 2009
332009
Plasma generating apparatus
SJ Jeon, Y Tolmachev, SH Lee, SH Seok, YM Park, WH Jang
US Patent 8,169,148, 2012
222012
Method of Forming an Epitaxial Layer and Apparatus for Processing a Substrate Used for the Method
TK Hong, Y Park, HW Oh, J Choi, SC Han
US Patent App. 14/520,768, 2015
32015
Plasma Processing Apparatus
JHL YM Park, YH Lim, JS Lee
KR Patent 101208408B1, 2010
2010
Wafer Transferring apparatus and transferring method thereof
HRP Youngmin Park, Dongchul Kim, DH Namgung, NJ Park
KR Patent App. 100676823B1, 2005
2005
Device and method for chemical vapour deposition (CVD)
YP Andrei
CN Patent App. 200,510,075,315, 2005
2005
A study on the dynamic feedback linearization of the nonlinear systems
Y Park
Chung-Ang University, 2003
2003
Optimal Structure of Wavelet Neural Network Systems Using Wavelet Decomposition Algorithm
류동영, 박영민, 이홍기
한국지능시스템학회 학술발표 논문집 12 (2), 171-174, 2002
2002
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