| Condition-based maintenance using the inverse Gaussian degradation model N Chen, ZS Ye, Y Xiang, L Zhang European Journal of Operational Research 243 (1), 190-199, 2015 | 263 | 2015 |
| Monitoring wafers’ geometric quality using an additive Gaussian process model L Zhang, K Wang, N Chen IIE Transactions 48 (1), 1-15, 2016 | 53 | 2016 |
| How heterogeneity influences condition-based maintenance for gamma degradation process L Zhang, Y Lei, H Shen International Journal of Production Research 54 (19), 5829-5841, 2016 | 21 | 2016 |
| Spatial correlated data monitoring in semiconductor manufacturing using Gaussian process model R Wang, L Zhang, N Chen IEEE Transactions on Semiconductor Manufacturing 32 (1), 104-111, 2018 | 13 | 2018 |
| Computational overlay metrology with adaptive data analytics E Schmitt-Weaver, V Subramony, Z Ullah, M Matsunobu, ... Metrology, Inspection, and Process Control for Microlithography XXXI 10145 …, 2017 | 10 | 2017 |
| A novel patterning control strategy based on real-time fingerprint recognition and adaptive wafer level scanner optimization HE Cekli, J Nije, A Ypma, V Bastani, D Sonntag, H Niesing, L Zhang, ... Metrology, Inspection, and Process Control for Microlithography XXXII 10585 …, 2018 | 7 | 2018 |
| Modeling tunnel profile in the presence of coordinate errors: A Gaussian process-based approach C Zhang, Y Lei, L Zhang, N Chen IISE Transactions 49 (11), 1065-1077, 2017 | 6 | 2017 |
| Modeling tunnel profile using Gaussian process L Zhang, Y Lei, N Chen 2015 IEEE International Conference on Industrial Engineering and Engineering …, 2015 | 5 | 2015 |
| Process context based wafer level grouping control: an advanced overlay process correction designed for DRAM 1z nm node in high volume manufacturing L Zhang, W Susanto, K Takahashi, A Chen, T Tang, Y Zou, C Lin, ... Metrology, Inspection, and Process Control for Microlithography XXXIV 11325 …, 2020 | 4 | 2020 |
| Time series of multivariate zero-inflated Poisson counts C Zhang, N Chen, L Zhang 2016 IEEE International Conference on Industrial Engineering and Engineering …, 2016 | 2 | 2016 |
| Spectral network approach for multi-channel profile data analysis with applications in advanced manufacturing C Zhang, L Zhang, N Chen 2017 IEEE International Conference on Industrial Engineering and Engineering …, 2017 | 1 | 2017 |
| MODELING SURFACE PROFILES USING GAUSSIAN PROCESSES WITH ENGINEERING APPLICATIONS Z LINMIAO | | 2015 |
