On-chip vacuum generated by a micromachined Knudsen pump S McNamara, YB Gianchandani Journal of Microelectromechanical Systems 14 (4), 741-746, 2005 | 158 | 2005 |
Single-mask microfabrication of three-dimensional objects from strained bimorphs E Moiseeva, YM Senousy, S McNamara, CK Harnett Journal of Micromechanics and Microengineering 17 (9), N63, 2007 | 60 | 2007 |
Knudsen pump driven by a thermoelectric material K Pharas, S McNamara Journal of Micromechanics and Microengineering 20 (12), 125032, 2010 | 59 | 2010 |
Scanning thermal lithography: Maskless, submicron thermochemical patterning of photoresist by ultracompliant probes AS Basu, S McNamara, YB Gianchandani Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004 | 57 | 2004 |
Micromachined shock sensor YB Gianchandani, SP Mcnamara US Patent 6,619,123, 2003 | 57 | 2003 |
Photodiode arrays having minimized cross-talk between diodes H Guckel, SP McNamara US Patent 6,133,615, 2000 | 46 | 2000 |
The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs) CN Arutt, ML Alles, W Liao, H Gong, JL Davidson, RD Schrimpf, RA Reed, ... Semiconductor science and technology 32 (1), 013005, 2016 | 42 | 2016 |
LIGA fabricated 19-element threshold accelerometer array S McNamara, YB Gianchandani Sensors and Actuators A: Physical 112 (1), 175-183, 2004 | 37 | 2004 |
Engineering stress in thin films for the field of bistable MEMS D Ratnayake, MD Martin, UR Gowrishetty, DA Porter, TA Berfield, ... Journal of Micromechanics and Microengineering 25 (12), 125025, 2015 | 20 | 2015 |
Ultracompliant thermal probe array for scanning non-planar surfaces without force feedback S McNamara, AS Basu, JH Lee, YB Gianchandani Journal of Micromechanics and Microengineering 15 (1), 237, 2004 | 20 | 2004 |
Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad YB Gianchandani, SP Mcnamara US Patent 7,367,781, 2008 | 19 | 2008 |
A micromachined Knudsen pump for on-chip vacuum S McNamara, YB Gianchandani TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 19 | 2003 |
Direct, high throughput LIGA for commercial applications: a progress report H Guckel, K Fischer, E Stiers, B Chaudhuri, S McNamara, M Ramotowski, ... Microsystem technologies 6, 103-105, 2000 | 19 | 2000 |
Maskless grayscale lithography using a positive-tone photodefinable polyimide for MEMS applications JH Lake, SD Cambron, KM Walsh, S McNamara Journal of microelectromechanical systems 20 (6), 1483-1488, 2011 | 18 | 2011 |
Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein YB Gianchandani, SP Mcnamara, J Lee, A Basu US Patent 7,073,938, 2006 | 18 | 2006 |
Pneumatic pumping of liquids using thermal transpiration for lab-on-a-chip applications C Yamarthy, K Pharas, A Schultz, S McNamara SENSORS, 2009 IEEE, 1931-1934, 2009 | 17 | 2009 |
A latching, bistable optical fiber switch combining LIGA technology with micromachined permanent magnets K Fischer, B Chaudhuri, S McNamara, H Guckel, Y Gianchandani, ... Transducers’ 01 Eurosensors XV: The 11th International Conference on Solid …, 2001 | 17 | 2001 |
Proton-induced displacement damage and total-ionizing-dose effects on silicon-based MEMS resonators H Gong, W Liao, EX Zhang, AL Sternberg, MW McCurdy, JL Davidson, ... IEEE Transactions on Nuclear Science 65 (1), 34-38, 2017 | 16 | 2017 |
Total-ionizing-dose effects in piezoresistive micromachined cantilevers H Gong, W Liao, EX Zhang, AL Sternberg, MW McCurdy, JL Davidson, ... IEEE Transactions on Nuclear Science 64 (1), 263-268, 2016 | 14 | 2016 |
Axial asymmetry for improved sensitivity in MEMS piezoresistors PD Shuvra, S McNamara, JT Lin, B Alphenaar, K Walsh, J Davidson Journal of Micromechanics and Microengineering 26 (9), 095014, 2016 | 14 | 2016 |