Atomic layer deposition of oxide film J Conley, Y Ono, R Solanki US Patent App. 10/376,774, 2004 | 556 | 2004 |
Method for depositing a nanolaminate film by atomic layer deposition JF Conley Jr, Y Ono, R Solanki US Patent 6,930,059, 2005 | 537 | 2005 |
Nanolaminate film atomic layer deposition method JF Conley Jr, Y Ono, R Solanki US Patent 7,053,009, 2006 | 502 | 2006 |
Method to perform selective atomic layer deposition of zinc oxide JF Conley Jr, Y Ono, DR Evans US Patent 7,160,819, 2007 | 488 | 2007 |
Method to control the interfacial layer for deposition of high dielectric constant films JF Conley Jr, Y Ono US Patent 6,875,677, 2005 | 477 | 2005 |
What Can Electron Paramagnetic Resonance Tell Us About the Si/SiO2 System? PM LENAHAN, JF CONLEY Journal of Vacuum Science & Technology B 16 (4), 2134 - 2153, 1998 | 437 | 1998 |
Instabilities in amorphous oxide semiconductor thin-film transistors JF Conley IEEE Transactions on Device and materials reliability 10 (4), 460-475, 2010 | 275 | 2010 |
Modulated temperature method of atomic layer deposition (ALD) of high dielectric constant film J Conley, O John F., S Yoshi, G M. US Patent 7,442,415, 2014 | 234* | 2014 |
Advancing MIM electronics: Amorphous metal electrodes EW Cowell III, N Alimardani, CC Knutson, JF Conley Jr, DA Keszler, ... Advanced Materials(FRG) 23 (1), 74-78, 2011 | 171 | 2011 |
Dielectrophoretically controlled fabrication of single-crystal nickel silicide nanowire interconnects L Dong, J Bush, V Chirayos, R Solanki, J Jiao, Y Ono, JF Conley, ... Nano Letters 5 (10), 2112-2115, 2005 | 164 | 2005 |
Electron spin resonance observation of trapped electron centers in atomic-layer-deposited hafnium oxide on Si AY Kang, PM Lenahan, JF Conley Jr Applied physics letters 83 (16), 3407-3409, 2003 | 134 | 2003 |
Atomic layer deposition of nanolaminate film J Conley, Y Ono, R Solanki US Patent App. 10/376,794, 2004 | 125 | 2004 |
Atomic layer deposition of hafnium oxide using anhydrous hafnium nitrate JF Conley Jr, Y Ono, W Zhuang, DJ Tweet, W Gao, SK Mohammed, ... Electrochemical and Solid State Letters 5 (5), C57, 2002 | 113 | 2002 |
ZnO-nanoparticle-coated carbon nanotubes demonstrating enhanced electron field-emission properties JM Green, L Dong, T Gutu, J Jiao, JF Conley, Y Ono Journal of Applied Physics 99 (9), 2006 | 111 | 2006 |
Directed assembly of ZnO nanowires on a Si substrate without a metal catalyst using a patterned ZnO seed layer JF Conley, L Stecker, Y Ono Nanotechnology 16 (2), 292, 2005 | 109 | 2005 |
Observation and electronic characterization of ‘‘new’’E′ center defects in technologically relevant thermal SiO2 on Si: An additional complexity in oxide charge trapping JF Conley, PM Lenahan, HL Evans, RK Lowry, TJ Morthorst Journal of applied physics 76 (5), 2872-2880, 1994 | 108 | 1994 |
Atomic layer deposition of two dimensional MoS2 on 150 mm substrates A Valdivia, DJ Tweet, JF Conley Journal of Vacuum Science & Technology A 34 (2), 2016 | 106 | 2016 |
Atomic layer deposition of thin hafnium oxide films using a carbon free precursor JF Conley, Y Ono, DJ Tweet, W Zhuang, R Solanki Journal of applied physics 93 (1), 712-718, 2003 | 105 | 2003 |
The radiation response of the high dielectric-constant hafnium oxide/silicon system AY Kang, PM Lenahan, JF Conley IEEE Transactions on Nuclear Science 49 (6), 2636-2642, 2002 | 105 | 2002 |
Room temperature reactions involving silicon dangling bond centers and molecular hydrogen in amorphous SiO2 thin films on silicon JF Conley, PM Lenahan Applied physics letters 62 (1), 40-42, 1993 | 105 | 1993 |