Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier N Suzuki, Y Hashimoto, H Yasuda, S Yamaki, Y Mochizuki CIRP annals 66 (1), 329-332, 2017 | 39 | 2017 |
Study on the effectiveness of extreme cold mist MQL system on turning process of stainless steel Aisi 316 AS Jamaludin, A Hosokawa, T Furumoto, T Koyano, Y Hashimoto IOP conference series: materials science and engineering 319 (1), 012054, 2018 | 36 | 2018 |
Evaluation of the minimum quantity lubrication in orthogonal cutting with the application of finite element method AS Jamaludin, A Hosokawa, T Furumoto, T Koyano, Y Hashimoto Int J Mech Mechatron Eng IJMME-IJENS 17 (01), 104-109, 2017 | 34 | 2017 |
High precision estimation on physical behavior for cutting with various tool rake angle by finite element method AS Jamaludin, H Akira, T Furumoto, T Koyano, Y Hashimoto Intelligent Manufacturing & Mechatronics: Proceedings of Symposium, 29 …, 2018 | 28 | 2018 |
Fundamental investigation of gyro finishing experimental investigation of contact force between cylindrical workpiece and abrasive media under dry condition Y Hashimoto, T Ito, Y Nakayama, T Furumoto, A Hosokawa Precision Engineering 67, 123-136, 2021 | 27 | 2021 |
Analytical prediction of contact stiffness and friction damping in bolted connection E Shamoto, Y Hashimoto, M Shinagawa, B Sencer CIRP Annals 63 (1), 353-356, 2014 | 23 | 2014 |
Temperature measurement of wire electrode in wire EDM by two-color pyrometer T Koyano, T Takahashi, S Tsurutani, A Hosokawa, T Furumoto, ... Procedia CIRP 68, 96-99, 2018 | 15 | 2018 |
Development of highly accurate simulation model of wafer behavior considering contact between wafer and carrier during double-sided lapping Y HASHIMOTO, R KONDO, T FURUMOTO, A HOSOKAWA 精密工学会誌 (Web) 83 (5), 433-438, 2017 | 15 | 2017 |
Development an identification method of friction coefficient between wafer and carrier in double-sided lapping Y Hashimoto, T Sano, T Furumoto, A Hosokawa Precision Engineering 56, 364-369, 2019 | 14 | 2019 |
CO2 laser cleavage of chemically strengthened glass T Furumoto, Y Hashimoto, H Ogi, T Kawabe, M Yamaguchi, T Koyano, ... Journal of Materials Processing Technology 289, 116961, 2021 | 11 | 2021 |
Internal face finishing for a cooling channel using a fluid containing free abrasive grains M Yamaguchi, T Furumoto, S Inagaki, M Tsuji, Y Ochiai, Y Hashimoto, ... The International Journal of Advanced Manufacturing Technology 114, 497-507, 2021 | 10 | 2021 |
Formation mechanism of pores inside structure fabricated by metal-based additive manufacturing K Egashira, T Furumoto, K Hishida, S Abe, T Koyano, Y Hashimoto, ... International Journal of Automation Technology 13 (3), 330-337, 2019 | 10 | 2019 |
Material removal efficiency improvement by orientation control of CMP pad surface asperities N Suzuki, H Misono, E Shamoto, Y Hashimoto, H Yasuda, Y Mochizuki Precision Engineering 62, 83-88, 2020 | 8 | 2020 |
A calculation method for workpiece profile variation during double-sided lapping by considering workpiece elastic deformation Y Hashimoto, R Ozaki, T Furumoto, A Hosokawa Precision Engineering 73, 457-469, 2022 | 7 | 2022 |
Estimation of material removal rate distribution in double-sided polishing of thick square workpiece considering workpiece attitude Y Hashimoto, T Sano, T Furumoto, A Hosokawa Journal of Advanced Mechanical Design, Systems, and Manufacturing 13 (1 …, 2019 | 7 | 2019 |
Turning of difficult-to-machine materials with an actively driven rotary tool (ADRT)—Proposition of reciprocating turning contingent on fundamental cutting characteristics— A Hosokawa, H Yoshimatsu, T Koyano, T Furumoto, Y Hashimoto Journal of Advanced Mechanical Design, Systems, and Manufacturing 12 (5 …, 2018 | 7 | 2018 |
Tool failure mechanism in high-speed milling of Inconel 718 by use of ceramic tools N Suzuki, R Enmei, Y Hashimoto, E Shamoto, Y Hatano International Journal of Automation Technology 8 (6), 837-846, 2014 | 7 | 2014 |
Elasto Hydrodynamic lubrication analysis of CMP process with consideration of micro asperity contact of polishing pad Y Hashimoto, N Suzuki, M Asaba, R Hino, E Shamoto Journal of the Japan Society for Precision Engineering 79 (1), 73-80, 2013 | 7 | 2013 |
Improving finishing efficiency using a cover plate in gyro finishing Y Hashimoto, Y Nakayama, T Furumoto, A Hosokawa Precision Engineering 74, 140-146, 2022 | 6 | 2022 |
Process state estimation in chemical mechanical polishing (CMP) by inverse analysis of in-process data N Suzuki, R Yamaguchi, Y Hashimoto, H Yasuda, S Yamaki, Y Mochizuki CIRP Annals 71 (1), 273-276, 2022 | 6 | 2022 |