SU-8 2002 surface micromachined deformable membrane mirrors SJ Lukes, DL Dickensheets Journal of Microelectromechanical Systems 22 (1), 94-106, 2013 | 39 | 2013 |
SU-8 focus control mirrors released by XeF2 dry etch SJ Lukes, DL Dickensheets SPIE MOEMS-MEMS, 793006-793006-6, 2011 | 14 | 2011 |
Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration SJ Lukes, RD Downey, ST Kreitinger, DL Dickensheets Applied Optics 55 (19), 5208-5218, 2016 | 11 | 2016 |
Agile scanning using a MEMS focus control mirror in a commercial confocal microscope SJ Lukes, DL Dickensheets SPIE BiOS, 89490W-89490W-11, 2014 | 11 | 2014 |
Stress engineering for free-standing SU-8 2002 thin film devices KW Oliver, SJ Lukes, MJ Moghimi, DL Dickensheets SPIE MOEMS-MEMS, 82480H-82480H-8, 2012 | 11 | 2012 |
Feedback-stabilized deformable membrane mirrors for focus control SJ Lukes, PA Himmer, EJ Moog, SR Shaw, DL Dickensheets Journal of Micro/Nanolithography, MEMS, and MOEMS 8 (4), 043040-043040-7, 2009 | 9 | 2009 |
MEMS deformable mirrors for focus control in vital microscopy BJ Lutzenburger, MJ Moghimi, SJ Lukes, B Kaylor, DL Dickensheets MOEMS-MEMS, 759406-759406-8, 2010 | 8 | 2010 |
Dynamic and Agile Focusing in Microscopy: A Review SJ Lukes https://spie.org/Publications/Book/2248542?&origin_id=x646, 2016 | 6 | 2016 |
MEMS focus control and spherical aberration correction for multilayer optical discs SJ Lukes, DL Dickensheets SPIE MOEMS-MEMS, 82520L-82520L-9, 2012 | 5 | 2012 |
Surface micro-machined SU-8 2002 deformable mirrors for focus control SJ Lukes, D Lämmleb, DL Dickensheetsa Proc. of SPIE Vol 7594, 75940E-1, 2010 | 5* | 2010 |
Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control S Lukes, BJ Lutzenberger, E Dunbar, SR Shaw, DL Dickensheets Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on …, 2009 | 5 | 2009 |
Polymer deformable membrane mirrors for focus control using SU-8 2002 E Dunbar, M Leone, S Lukes, DL Dickensheets 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics, 2008 | 5 | 2008 |
A compact F/5 camera lens with MEMS mocus control DL Dickensheets, MJ Moghimi, SJ Lukes, BJ Lutzenberger, BM Kaylor, ... ICOME2011 Conference, China (June, 2011), 2011 | 4 | 2011 |
Surface micro-machined SU-8 2002 membrane mirrors for focus control SJ Lukes, D Lämmle, DL Dickensheets MOEMS-MEMS, 75940E-75940E-6, 2010 | 4 | 2010 |
Imaging performance of elliptical-boundary varifocal mirrors in active optical systems SJ Lukes | 3 | 2015 |
Surface micro-machined SU-8 2002 deformable membrane mirrors SJ Lukes Montana State University-Bozeman, College of Engineering, 2011 | 3 | 2011 |
MEMS mirror for flexible z-axis control in a commercial confocal microscope SJ Lukes, DL Dickensheets Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, 148-149, 2012 | 2 | 2012 |
From Research Lab to Industry: Commercializing MEMS Focusing and Zoom Imaging Technology SJ Lukes, DS John, D Traucht, S Mondl, B Huntley, J Dilts, T Lynn Applied Industrial Optics: Spectroscopy, Imaging and Metrology, T2A. 3, 2019 | 1 | 2019 |
Solid, good, and great program managers/principal investigators: editorial R Driggers, D Mas, J Perez, B Ferrer, J Espinosa, SJ Lukes, RD Downey, ... Applied Optics 55 (19), ED8-ED8, 2016 | 1 | 2016 |
Novel focus-control mirrors move further under closed-loop control S Lukes, SR Shaw, DL Dickensheets | | |