Effect of Ti-Al cathode composition on plasma generation and plasma transport in direct current vacuum arc I Zhirkov, AO Eriksson, A Petruhins, M Dahlqvist, AS Ingason, J Rosén Journal of Applied Physics 115 (12), 2014 | 60 | 2014 |
Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiBx thin films I Petrov, A Hall, AB Mei, N Nedfors, I Zhirkov, J Rosen, A Reed, B Howe, ... Journal of Vacuum Science & Technology A 35 (5), 2017 | 56 | 2017 |
Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS J Thörnberg, J Palisaitis, N Hellgren, FF Klimashin, N Ghafoor, I Zhirkov, ... Surface and Coatings Technology 404, 126537, 2020 | 46 | 2020 |
Ion velocities in direct current arc plasma generated from compound cathodes I Zhirkov, AO Eriksson, J Rosén Journal of Applied Physics 114 (21), 2013 | 42 | 2013 |
Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes I Zhirkov, A Petruhins, J Rosén Surface and Coatings Technology 281, 20-26, 2015 | 40 | 2015 |
Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosen Journal of Vacuum Science & Technology A 35 (6), 2017 | 38 | 2017 |
Time evolution of ion fluxes incident at the substrate plane during reactive high-power impulse magnetron sputtering of groups IVb and VIb transition metals in Ar/N2 G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosen Journal of Vacuum Science & Technology A 36 (2), 2018 | 37 | 2018 |
A plasma-cathode electron source for focused-beam generation in the fore-pump pressure range VA Burdovitsin, IS Zhirkov, EM Oks, IV Osipov, MV Fedorov Instruments and Experimental Techniques 48, 761-763, 2005 | 37 | 2005 |
Formation of narrow-focused electron beams generated by a source with a plasma cathode in the forevacuum pressure range IS Zhirkov, VA Burdovitsin, EM Oks, IV Osipov Technical Physics 51, 786-790, 2006 | 34 | 2006 |
High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature N Hellgren, J Thörnberg, I Zhirkov, MA Sortica, I Petrov, JE Greene, ... Vacuum 169, 108884, 2019 | 30 | 2019 |
Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions AO Eriksson, I Zhirkov, M Dahlqvist, J Jensen, L Hultman, J Rosen Journal of Applied Physics 113 (16), 2013 | 29 | 2013 |
Control of the metal/gas ion ratio incident at the substrate plane during high-power impulse magnetron sputtering of transition metals in Ar G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosén Thin Solid Films 642, 36-40, 2017 | 26 | 2017 |
Experimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge I Zhirkov, E Oks, J Rosen Journal of Applied Physics 117 (9), 2015 | 26 | 2015 |
Vacuum arc plasma generation and thin film deposition from a TiB2 cathode I Zhirkov, A Petruhins, LA Naslund, S Kolozsvári, P Polcik, J Rosen Applied Physics Letters 107 (18), 2015 | 25 | 2015 |
Generation of super-size macroparticles in a direct current vacuum arc discharge from a Mo-Cu cathode I Zhirkov, A Petruhins, P Polcik, S Kolozsvári, J Rosen Applied Physics Letters 108 (5), 2016 | 23 | 2016 |
The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering N Nedfors, D Primetzhofer, I Zhirkov, J Palisaitis, POÅ Persson, ... Vacuum 177, 109355, 2020 | 22 | 2020 |
Effect of N2 and Ar gas on DC arc plasma generation and film composition from Ti-Al compound cathodes I Zhirkov, E Oks, J Rosen Journal of Applied Physics 117 (21), 2015 | 20 | 2015 |
Discharge initiation in a hollow-cathode plasma source of electrons IS Zhirkov, VA Burdovitsin, EM Oks, IV Osipov Technical physics 51, 1379-1382, 2006 | 17 | 2006 |
Structural and mechanical characterization of nanostructured titanium oxide thin films deposited by filtered cathodic vacuum arc C Paternoster, I Zhirkov, MP Delplancke-Ogletree Surface and Coatings Technology 227, 42-47, 2013 | 15 | 2013 |
Macroparticle generation in DC arc discharge from a WC cathode I Zhirkov, P Polcik, S Kolozsvári, J Rosen Journal of Applied Physics 121 (10), 2017 | 13 | 2017 |