Optical inspection of Microsystems W Osten, A Duparre, C Furlong, I De Wolf, A Asundi, K Korner, D Vogel, ... CRC press, 2018 | 244 | 2018 |
Measurement system for full three-dimensional motion characterization of MEMS C Rembe, RS Muller Journal of Microelectromechanical Systems 11 (5), 479-488, 2002 | 159 | 2002 |
Optical measurement methods to study dynamic behavior in MEMS C Rembe, R Kant, RS Muller Microsystems Engineering: Metrology and Inspection 4400, 127-137, 2001 | 141 | 2001 |
Fluidic self-assembly of micromirrors onto microactuators using capillary forces U Srinivasan, MA Helmbrecht, C Rembe, RS Muller, RT Howe IEEE Journal of Selected Topics in Quantum Electronics 8 (1), 4-11, 2002 | 129 | 2002 |
Measuring MEMS in motion by laser Doppler vibrometry C Rembe, G Siegmund, H Steger, M Wörtge Optical Inspection of Microsystems, Second Edition, 297-347, 2019 | 83 | 2019 |
Micromirrors for adaptive-optics arrays MA Helmbrecht, U Srinivasan, C Rembe, RT Howe, RS Muller Transducers’ 01 Eurosensors XV: The 11th International Conference on Solid …, 2001 | 79 | 2001 |
Analysis of the dynamics in microactuators using high-speed cine photomicrography C Rembe, B Tibken, EP Hofer Journal of Microelectromechanical Systems 10 (1), 137-145, 2001 | 68 | 2001 |
Laser-scanning confocal vibrometer microscope: Theory and experiments C Rembe, A Dräbenstedt Review of scientific instruments 77 (8), 2006 | 60 | 2006 |
Thermal ink jet dynamics: modeling, simulation, and testing C Rembe, S aus der Wiesche, EP Hofer Microelectronics Reliability 40 (3), 525-532, 2000 | 57 | 2000 |
Integrated optical frequency shifter in silicon-organic hybrid (SOH) technology M Lauermann, C Weimann, A Knopf, W Heni, R Palmer, S Koeber, ... Optics express 24 (11), 11694-11707, 2016 | 52 | 2016 |
Full three-dimensional motion characterization of a gimballed electrostatic microactuator C Rembe, L Muller, RS Muller, RT Howe 2001 IEEE International Reliability Physics Symposium Proceedings. 39th …, 2001 | 52 | 2001 |
Heterodyne laser-Doppler vibrometer with a slow-shear-mode Bragg cell for vibration measurements up to 1.2 GHz C Rembe, S Boedecker, A Dräbenstedt, F Pudewills, G Siegmund Eighth International Conference on Vibration Measurements by Laser …, 2008 | 44 | 2008 |
High-speed visualization, a powerful diagnostic tool for microactuators–retrospect and prospect P Krehl, S Engemann, C Rembe, EP Hofer Microsystem Technologies 5, 113-132, 1999 | 44 | 1999 |
How accurate is optical second-harmonic generation? R Wynands, O Coste, C Rembe, D Meschede Optics letters 20 (10), 1095-1097, 1995 | 38 | 1995 |
Remote-sensing vibrometry at 1550 nm wavelength A Dräbenstedt, J Sauer, C Rembe AIP conference proceedings 1457 (1), 113-121, 2012 | 36 | 2012 |
Fluidic self-assembly of micromirrors onto surface micromachined actuators U Srinivasan, M Helmbrecht, C Rembe, RS Muller, RT Howe 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 00EX399 …, 2000 | 34 | 2000 |
Real-cinematographic visualization of droplet ejection in thermal ink jets C Rembe, J Patzer, EP Hofer, P Krehl Color Imaging: Device-Independent Color, Color Hard Copy, and Graphic Arts …, 1996 | 34 | 1996 |
Optical three-dimensional vibrometer microscope with picometer-resolution in , , and C Rembe, R Kowarsch, W Ochs, A Dräbenstedt, M Giesen, M Winter Optical Engineering 53 (3), 034108-034108, 2014 | 31 | 2014 |
The problem of calibrating laser-Doppler vibrometers at high frequencies M Winter, H Füser, M Bieler, G Siegmund, C Rembe AIP Conference Proceedings 1457 (1), 165-175, 2012 | 30 | 2012 |
Boiling of superheated liquids near the spinodal: I General theory S Aus der Wiesche, C Rembe, EP Hofer Heat and mass transfer 35 (1), 25-31, 1999 | 29 | 1999 |