Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy PY Jouan, MC Peignon, C Cardinaud, G Lempérière Applied Surface Science 68 (4), 595-603, 1993 | 241 | 1993 |
Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working … KA Aissa, A Achour, J Camus, L Le Brizoual, PY Jouan, MA Djouadi Thin Solid Films 550, 264-267, 2014 | 113 | 2014 |
Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications V Mortet, A Vasin, PY Jouan, O Elmazria, MA Djouadi Surface and coatings technology 176 (1), 88-92, 2003 | 72 | 2003 |
Fretting wear properties of CrN and Cr2N coatings A Tricoteaux, PY Jouan, JD Guerin, J Martinez, A Djouadi Surface and Coatings Technology 174, 440-443, 2003 | 61 | 2003 |
Deposition of nickel oxide by direct current reactive sputtering: effect of oxygen partial pressure A Karpinski, A Ferrec, M Richard-Plouet, L Cattin, MA Djouadi, L Brohan, ... Thin Solid Films 520 (9), 3609-3613, 2012 | 56 | 2012 |
Glow discharge mass spectrometry study of the deposition of thin films by direct current reactive magnetron sputtering of a Ti target V Vancoppenolle, PY Jouan, M Wautelet, JP Dauchot, M Hecq Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (6 …, 1999 | 55 | 1999 |
Thickness and substrate effects on AlN thin film growth at room temperature B Abdallah, C Duquenne, MP Besland, E Gautron, PY Jouan, PY Tessier, ... The European Physical Journal-Applied Physics 43 (3), 309-313, 2008 | 52 | 2008 |
Impact of magnetron configuration on plasma and film properties of sputtered aluminum nitride thin films C Duquenne, PY Tessier, MP Besland, B Angleraud, PY Jouan, R Aubry, ... Journal of Applied Physics 104 (6), 2008 | 50 | 2008 |
HiPIMS ion energy distribution measurements in reactive mode PY Jouan, L Le Brizoual, M Ganciu, C Cardinaud, S Tricot, MA Djouadi IEEE transactions on plasma science 38 (11), 3089-3094, 2010 | 46 | 2010 |
Nitrogen doping on NiO by reactive magnetron sputtering: a new pathway to dynamically tune the optical and electrical properties J Keraudy, A Ferrec, M Richard-Plouet, J Hamon, A Goullet, PY Jouan Applied Surface Science 409, 77-84, 2017 | 45 | 2017 |
Correlation between mass-spectrometer measurements and thin film characteristics using dcMS and HiPIMS discharges A Ferrec, J Keraudy, S Jacq, F Schuster, PY Jouan, MA Djouadi Surface and Coatings Technology 250, 52-56, 2014 | 45 | 2014 |
Optical characterization of transparent nickel oxide films deposited by DC current reactive sputtering A Karpinski, N Ouldhamadouche, A Ferrec, L Cattin, M Richard-Plouet, ... Thin Solid Films 519 (17), 5767-5770, 2011 | 43 | 2011 |
Structural, morphological and electrical properties of nickel oxide thin films deposited by reactive sputtering J Keraudy, JG Molleja, A Ferrec, B Corraze, M Richard-Plouet, A Goullet, ... Applied surface science 357, 838-844, 2015 | 42 | 2015 |
AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth JG Molleja, BJ Gómez, J Ferrón, E Gautron, J Bürgi, B Abdallah, ... The European Physical Journal-Applied Physics 64 (2), 20302, 2013 | 40 | 2013 |
Emission spectrometry diagnostic of sputtered titanium in magnetron amplified discharges C Nouvellon, S Konstantinidis, JP Dauchot, M Wautelet, PY Jouan, ... Journal of applied physics 92 (1), 32-36, 2002 | 40 | 2002 |
Dc magnetron sputtering deposition of TiO2 films in argon–oxygen gas mixtures: theory and experiments V Vancoppenolle, PY Jouan, M Wautelet, JP Dauchot, M Hecq Surface and Coatings Technology 116, 933-937, 1999 | 40 | 1999 |
XPS study of the band alignment at ITO/oxide (n‐type MoO3 or p‐type NiO) interface JC Bernède, S Houari, D Nguyen, PY Jouan, A Khelil, A Mokrani, L Cattin, ... physica status solidi (a) 209 (7), 1291-1297, 2012 | 37 | 2012 |
A model for hardness determination of thin coatings from standard micro-indentation tests J Lesage, D Chicot, A Pertuz, PY Jouan, N Horny, A Soom Surface and Coatings Technology 200 (1-4), 886-889, 2005 | 36 | 2005 |
Deposition of AlN films by reactive sputtering: Effect of radiofrequency substrate bias B Abdallah, A Chala, PY Jouan, MP Besland, MA Djouadi Thin solid films 515 (18), 7105-7108, 2007 | 34 | 2007 |
Mass spectrometry analyzes to highlight differences between short and long HiPIMS discharges A Ferrec, J Kéraudy, PY Jouan Applied Surface Science 390, 497-505, 2016 | 33 | 2016 |