受强制性开放获取政策约束的文章 - Dmitry Lopaev (ORCID: 0000-0003-4975-3487)了解详情
无法在其他位置公开访问的文章：2 篇
A non-destructive, fast evaluation of PVD diffusion barriers deposited on porous low-k dielectrics
Y Wang, P He, J Zhang, J Yan, DV Lopaev, XP Qu, MR Baklanov
Microelectronic Engineering 198, 22-28, 2018
强制性开放获取政策： 国家自然科学基金委员会
Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission
AI Zotovich, SM Zyryanov, DV Lopaev, AA Rezvanov, AG Attallah, ...
ACS Applied Electronic Materials 4 (6), 2760-2776, 2022
强制性开放获取政策： Helmholtz Association
可在其他位置公开访问的文章：6 篇
Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models
MR Baklanov, V Jousseaume, TV Rakhimova, DV Lopaev, ...
Applied Physics Reviews 6 (1), 2019
强制性开放获取政策： US National Science Foundation
Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma
JP Booth, O Guaitella, A Chatterjee, C Drag, V Guerra, D Lopaev, ...
Plasma Sources Science and Technology 28 (5), 055005, 2019
强制性开放获取政策： Fundação para a Ciência e a Tecnologia, Portugal, Agence Nationale de la …
Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
DI Astakhov, WJ Goedheer, CJ Lee, VV Ivanov, VM Krivtsun, KN Koshelev, ...
Journal of Physics D: Applied Physics 49 (29), 295204, 2016
强制性开放获取政策： Netherlands Organisation for Scientific Research
Determination of absolute O (3P) and O2 (a1 Δ g) densities and kinetics in fully modulated O2 dc glow discharges from the O2 (X3 Σ g−) afterglow recovery dynamics
JP Booth, A Chatterjee, O Guaitella, JS Sousa, D Lopaev, S Zyryanov, ...
Plasma Sources Science and Technology 29 (11), 115009, 2020
强制性开放获取政策： Agence Nationale de la Recherche
Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers
R Van den Bos, J Reinink, DV Lopaev, CJ Lee, JPH Benschop, F Bijkerk
Journal of Physics D: Applied Physics 51 (11), 115302, 2018
强制性开放获取政策： Netherlands Organisation for Scientific Research
Filling the gaps in our understanding of plasmas in simple diatomic gases-combining a DC plasma in pure O2 with multiple advanced diagnostics for experimental validation of …
JP Booth, A Chatterjee, O Guaitella, D Lopaev, S Zyryanov, T Rakhimova, ...
IS Plasma 2021, 2021
强制性开放获取政策： Agence Nationale de la Recherche
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