Piezoresistive cantilever as portable micro force calibration standard I Behrens, L Doering, E Peiner Journal of micromechanics and microengineering 13 (4), S171, 2003 | 115 | 2003 |
Micro force sensor with piezoresistive amorphous carbon strain gauge E Peiner, A Tibrewala, R Bandorf, S Biehl, H Lüthje, L Doering Sensors and actuators A: Physical 130, 75-82, 2006 | 91 | 2006 |
Form measurement inside fuel injector nozzle spray holes E Peiner, M Balke, L Doering Microelectronic Engineering 86 (4-6), 984-986, 2009 | 72 | 2009 |
Diamond-like carbon for MEMS E Peiner, A Tibrewala, R Bandorf, H Lüthje, L Doering, W Limmer Journal of micromechanics and microengineering 17 (7), S83, 2007 | 63 | 2007 |
Slender tactile sensor for contour and roughness measurements within deep and narrow holes E Peiner, M Balke, L Doering IEEE Sensors Journal 8 (12), 1960-1967, 2008 | 48 | 2008 |
Tactile probes for dimensional metrology with microcomponents at nanometre resolution E Peiner, M Balke, L Doering, U Brand Measurement Science and technology 19 (6), 064001, 2008 | 37 | 2008 |
Precise determination of force microscopy cantilever stiffness from dimensions and eigenfrequencies J Lübbe, L Doering, M Reichling Measurement Science and Technology 23 (4), 045401, 2012 | 35 | 2012 |
Force calibration of stylus instruments using silicon microcantilevers E Peiner, L Doering Sensors and Actuators A: Physical 123, 137-145, 2005 | 31 | 2005 |
Nondestructive evaluation of diesel spray holes using piezoresistive sensors E Peiner, L Doering IEEE Sensors Journal 13 (2), 701-708, 2012 | 22 | 2012 |
Silicon cantilever sensor for micro-/nanoscale dimension and force metrology E Peiner, L Doering, M Balke, A Christ Microsystem technologies 14, 441-451, 2008 | 22 | 2008 |
The fundamental architecture of the DCC S Hackel, F Härtig, T Schrader, A Scheibner, J Loewe, L Doering, ... Measurement: Sensors 18, 100354, 2021 | 20 | 2021 |
Long slender piezo-resistive silicon microprobes for fast measurements of roughness and mechanical properties inside micro-holes with diameters below 100 µm U Brand, M Xu, L Doering, J Langfahl-Klabes, H Behle, S Bütefisch, ... Sensors 19 (6), 1410, 2019 | 19 | 2019 |
High-speed microprobe for roughness measurements in high-aspect-ratio microstructures L Doering, U Brand, S Bütefisch, T Ahbe, T Weimann, E Peiner, T Frank Measurement Science and Technology 28 (3), 034009, 2017 | 19 | 2017 |
Micro force transfer standards L Doring, U Brand, J Fruhauf VDI BERICHTE 1685, 83-90, 2002 | 19 | 2002 |
Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system G Hamdana, M Bertke, L Doering, T Frank, U Brand, HS Wasisto, E Peiner Journal of Sensors and Sensor Systems 6 (1), 121-133, 2017 | 18 | 2017 |
Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement T Frank, L Doering, G Heinrich, N Thronicke, C Löbner, S Völlmeke, ... Microsystem technologies 20, 927-931, 2014 | 14 | 2014 |
Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers J Frühauf, E Gaertner, U Brand, L Doering Proceedings of the 4th EUSPEN International Conference, Glasgow, UK, 362-363, 2004 | 12 | 2004 |
Smart sensors and calibration standards for high precision metrology U Brand, S Gao, L Doering, Z Li, M Xu, S Buetefisch, E Peiner, J Fruehauf, ... Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems 9517, 200-209, 2015 | 11 | 2015 |
Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments J Kähler, A Stranz, L Doering, S Merzsch, N Heuck, A Waag, E Peiner Microsystem technologies 18, 869-878, 2012 | 11 | 2012 |
MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes E Peiner, L Doering Microsystem technologies 16, 1259-1268, 2010 | 11 | 2010 |