Fast response humidity sensors for a medical microsystem A Tetelin, C Pellet, C Laville, G N’Kaoua Sensors and Actuators B: Chemical 91 (1-3), 211-218, 2003 | 113 | 2003 |
Interdigitated humidity sensors for a portable clinical microsystem C Laville, C Pellet, G N'Kaoua 1st Annual International IEEE-EMBS Special Topic Conference on …, 2000 | 87 | 2000 |
A straightforward determination of fluid viscosity and density using microcantilevers: From experimental data to analytical expressions M Youssry, N Belmiloud, B Caillard, C Ayela, C Pellet, I Dufour Sensors and Actuators A: Physical 172 (1), 40-46, 2011 | 79 | 2011 |
The microcantilever: A versatile tool for measuring the rheological properties of complex fluids I Dufour, A Maali, Y Amarouchene, C Ayela, B Caillard, A Darwiche, ... Journal of Sensors 2012 (1), 719898, 2012 | 77 | 2012 |
Epitaxial growth of yttria‐stabilized zirconia films on silicon by ultrahigh vacuum ion beam sputter deposition P Legagneux, G Garry, D Dieumegard, C Schwebel, C Pellet, G Gautherin, ... Applied physics letters 53 (16), 1506-1508, 1988 | 77 | 1988 |
Comparison of three humidity sensors for a pulmonary function diagnosis microsystem C Laville, C Pellet IEEE Sensors Journal 2 (2), 96-101, 2002 | 75 | 2002 |
Humidity sensors for a pulmonary function diagnostic microsystem C Laville, JY Deletage, C Pellet Sensors and Actuators B: Chemical 76 (1-3), 304-309, 2001 | 60 | 2001 |
Dynamic behavior of a chemical sensor for humidity level measurement in human breath A Tetelin, V Pouget, JL Lachaud, C Pellet IEEE Transactions on Instrumentation and Measurement 53 (4), 1262-1267, 2004 | 59 | 2004 |
Growth of silicon homoepitaxial thin films by ultrahigh vacuum ion beam sputter deposition C Schwebel, F Meyer, G Gautherin, C Pellet Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986 | 57 | 1986 |
Raman scattering and stress measurements in Si1−xGex layers epitaxially grown on Si(100) by ion‐beam sputter deposition F Meyer, M Zafrany, M Eizenberg, R Beserman, C Schwebel, C Pellet Journal of applied physics 70 (8), 4268-4277, 1991 | 52 | 1991 |
Modeling and performance of uncoated microcantilever-based chemical sensors S Tétin, B Caillard, F Ménil, H Debéda, C Lucat, C Pellet, I Dufour Sensors and Actuators B: Chemical 143 (2), 555-560, 2010 | 49 | 2010 |
Physical and electrical properties of yttria-stabilized zirconia epitaxial thin films deposited by ion beam sputtering on silicon C Pellet, C Schwebel, P Hesto Thin Solid Films 175, 23-28, 1989 | 46 | 1989 |
Geometry optimization of uncoated silicon microcantilever-based gas density sensors MT Boudjiet, J Bertrand, F Mathieu, L Nicu, L Mazenq, T Leichle, ... Sensors and Actuators B: Chemical 208, 600-607, 2015 | 39 | 2015 |
Modeling and optimization of a fast response capacitive humidity sensor A Tetelin, C Pellet IEEE Sensors Journal 6 (3), 714-720, 2006 | 39 | 2006 |
New characterization methods for monitoring small resonant frequency variation: Experimental tests in the case of hydrogen detection with uncoated silicon microcantilever-based … MT Boudjiet, J Bertrand, C Pellet, I Dufour Sensors and Actuators B: Chemical 199, 269-276, 2014 | 28 | 2014 |
Pirani pressure sensor for smart wafer-level packaging F Mailly, N Dumas, N Pous, L Latorre, O Garel, E Martincic, F Verjus, ... Sensors and Actuators A: Physical 156 (1), 201-207, 2009 | 28 | 2009 |
FTIR spectroscopy for the hermeticity assessment of micro-cavities D Veyrié, D Lellouchi, JL Roux, F Pressecq, A Tetelin, C Pellet Microelectronics Reliability 45 (9-11), 1764-1769, 2005 | 28 | 2005 |
Epitaxial growth of single-crystal Si1− xGex on Si (100) by ion beam sputter deposition F Meyer, C Schwebel, C Pellet, G Gautherin, A Buxbaum, M Eizenberg, ... Thin Solid Films 184 (1-2), 117-123, 1990 | 27 | 1990 |
Angular distributions of heavy particles emitted from a Si target during an ion beam sputter process C Schwebel, C Pellet, G Gautherin Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1986 | 26 | 1986 |
Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions F Meyer, D Louchier, V Stambouli, C Pellet, C Schwebel, G Gautherin Applied surface science 38 (1-4), 286-294, 1989 | 25 | 1989 |