This work reports the simulation and fabrication of a piezoelectric acceleration sensor on a
macroscopic scale. An accelerometer is an electronic device that measures proper …

A new type of tri-axial piezoelectric accelerometer is proposed in this study. It consists of a
seismic mass and four cantilever beams that is distributed in a shape of X. Analytical model …

An increasing number of individuals are delving into the research of high-precision multi-
axis vibration sensors. Traditional multi-axis piezoelectric accelerometers are constructed by …

Background: MEMS piezoelectric accelerometers are used in many different applications. In
Some applications, accelerometers have to measure the acceleration at high frequency …

A piezoelectric accelerometer based on bulk micromachining was presented in this paper. It
is composed of a mass block and four cantilever beams with PZT piezoelectric thin films for …

This paper explores steps towards induced stress enhancement of a new improved design
of a 6-axis single-mass piezoelectric motion sensor. The detailed numerical analysis was …

Piezoelectric accelerometers are used to measure vibration and impact acceleration. In this
paper we develop a piezoelectric accelerometer, which can measure the acceleration of a …

A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was
developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which …

This paper reports a new concept of a 3-axis accelerometer design along with proposed
fabrication steps and a circuit readout configuration. In order to achieve a better performance …

This work presents a novel three-axis accelerometer that uses capacitive and piezoelectric
sensing mechanisms. In the proposed structure, the out-of-plane accelerometer senses the …