… Two-dimensional carrier profiling using scanning spreading resistance microscopy (SSRM) …
The emergence of scanning spreading resistance microscopy (SSRM) into the realm of 2D …

… calibration curves and the fast quantification of one-dimensional and two-dimensional resistivity
(and carrier) profiles. … In these structures, the resistivity levels are ranging from 1e-3 to 10 …

… ) carrier concentration profiling using scanning spreading resistance microscopy (SSRM)1
on III… of calibration standards based on a secondary dopant profiling technique such as SIMS. …

… detail on Si structures, very little work was made on III–V materials. … for the analysis of III–V
semiconductor structures, and in … this type of plot to calibrate the SSRM resistance image of an …

… 3 several carrier profiling tools have been developed for measuring the 2D carrier distribution
in InP-based structure… based on a well-defined calibration sample and 3D device modeling …

… calibration profile has been developed on homoepitaxial ZnO:Ga multilayer staircase structures
… The Ga density measured by SIMS varies in the 1.7 × 10 17 cm −3 to 3 × 10 20 cm −3 …

… (2D) carrier profile of III–V semiconductor structures. The InPbased structures were grown
by … An alternative method may be to use SIMS profiles of the same structure for calibration. In …

… BH laser was buried by a four-layer thyristor structure with al- … The epitaxial InP structures
with staircase doping profiles … cm 3 for both n-type Si and p-type Be-doped staircase structures. …

… And the obtained carrier density here is higher than at the tip position 3 Fig. 4a where the
tip … for the whole structure. For the carrier profile peak in the QW the calibration curve was …

… spreading resistance values and calibrated with the known … carrier profile reveals a
multishell structure of the carrier … Figure 3 presents profiles of RS along the radial NW direction (…