A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√ Hz noise floor
A Elsayed, A Elshennawy, A Elmallah… - 2011 IEEE Custom …, 2011 - ieeexplore.ieee.org
2011 IEEE Custom Integrated Circuits Conference (CICC), 2011•ieeexplore.ieee.org
An interface for MEMS gyroscope is implemented in 0.18 µm HVCMOS technology, and
achieves a low noise floor of 1m°/sec/√ Hz over 200Hz BW. Electromechanical ΣΔ force-
feedback and self-clocking scheme based on gyro resonance are implemented. The
interface includes on-chip reference generation, decimation, and temperature
compensation.
achieves a low noise floor of 1m°/sec/√ Hz over 200Hz BW. Electromechanical ΣΔ force-
feedback and self-clocking scheme based on gyro resonance are implemented. The
interface includes on-chip reference generation, decimation, and temperature
compensation.
An interface for MEMS gyroscope is implemented in 0.18µm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
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