photonicBiCMOSprocess which allows for dense co-integration of 200GHz bipolar transistors and CMOS devices with low-loss waveguides and couplers, Si photonic modulators and, for the first time, high-speed Ge photodiodes. 2) The BiCMOSintegrated, WG-coupled Ge PIN diodes show a 3-dB bandwidth of 35GHz, internal responsivity of more than 0.6A/W at λ= 1.55µm, and ~ 50nA dark current at 1V. 3) Grating couplers are … Finally …
Abstract
A monolithically integrated 25Gbps receiver is shown as a demonstrator for a novel photonic BiCMOS process which allows for dense co-integration of 200GHz bipolar transistors and CMOS devices with waveguides, couplers, and Ge photodiodes.