RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication
HJ De Los Santos, G Fischer… - IEEE Microwave …, 2004 - ieeexplore.ieee.org
IEEE Microwave Magazine, 2004•ieeexplore.ieee.org
The aim of this article to expose the impact and status of the application of RF-MEMS
switchable capacitors, varactors and switches in the three elements of this paradigm,
namely, handsets, base stations, and satellites. In particular, issues such as system-level
motivation/justification for RF MEMS, device requirements, high-volume manufacturing,
packaging, and state-of-the-art performance and reliability, are presented.
switchable capacitors, varactors and switches in the three elements of this paradigm,
namely, handsets, base stations, and satellites. In particular, issues such as system-level
motivation/justification for RF MEMS, device requirements, high-volume manufacturing,
packaging, and state-of-the-art performance and reliability, are presented.
The aim of this article to expose the impact and status of the application of RF-MEMS switchable capacitors, varactors and switches in the three elements of this paradigm, namely, handsets, base stations, and satellites. In particular, issues such as system-level motivation/justification for RF MEMS, device requirements, high-volume manufacturing, packaging, and state-of-the-art performance and reliability, are presented.
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