Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe

M Darnon, G Cunge… - Plasma Sources Science …, 2014 - iopscience.iop.org
Plasma Sources Science and Technology, 2014iopscience.iop.org
The resurgence of industrial interest in pulsed radiofrequency plasmas for etching
applications highlights the fact that these plasmas are much less well characterized than
their continuous wave counterparts. A capacitively coupled planar probe is used to
determine the time variations of the ion flux, electron temperature (of the high-energy tail of
the electron energy distribution function) and plasma density. For a pulsing frequency of 1
kHz or higher, the plasma never reaches a steady state during the on-time and is not fully …
Abstract
The resurgence of industrial interest in pulsed radiofrequency plasmas for etching applications highlights the fact that these plasmas are much less well characterized than their continuous wave counterparts. A capacitively coupled planar probe is used to determine the time variations of the ion flux, electron temperature (of the high-energy tail of the electron energy distribution function) and plasma density. For a pulsing frequency of 1 kHz or higher, the plasma never reaches a steady state during the on-time and is not fully extinguished during the off-time. The drop of plasma density during the off-time leads to an overshoot in the electron temperature at the beginning of each pulse, particularly at low frequencies, in good agreement with modeling results from the literature.
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