Efficiency enhancement of diffractive optical elements by variable relief profiling
A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Microelectronic …, 1995 - Elsevier
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …
lithography and existing methodes for the production of microelectronic components …
Efficiency enhancement of diffractive optical elements by variable relief profiling
A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Microelectronic …, 1995 - infona.pl
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …
lithography and existing methodes for the production of microelectronic components …
[引用][C] Efficiency enhancement of diffractive optical elements by variable relief profiling
A STEMMER, H ZARSCHIZKY… - Microelectronic …, 1995 - pascal-francis.inist.fr
Efficiency enhancement of diffractive optical elements by variable relief profiling CNRS Inist
Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search Advanced …
Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search Advanced …
Efficiency enhancement of diffractive optical elements by variable relief profiling
A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Microelectronic …, 1995 - dl.acm.org
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …
lithography and existing methodes for the production of microelectronic components …
Efficiency Enhancement of Diffractive Optical Elements by Variable Relief Profiling
A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Microelectronic …, 1995 - elibrary.ru
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …
lithography and existing methodes for the production of microelectronic components …
Efficiency enhancement of diffractive optical elements by variable relief profiling
A Stemmer, H Zarschizky, E Knapek, G Lefranc… - Proceedings of the …, 1995 - dl.acm.org
Diffractive optical elements (DOEs) are realized with various reliefs using e-beam
lithography and existing methodes for the production of microelectronic components …
lithography and existing methodes for the production of microelectronic components …