Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

M Meunier, B Fisette, A Houle… - … of Ultrafast Lasers …, 2003 - spiedigitallibrary.org
A microfabrication system with the use of a femtosecond laser was designed for 3D
processing of industrially important materials. The system includes a 120 fs, 1 kHz laser; …

Femtosecond laser ablation and nanostructuring

BN Chichkov, F Korte, J Koch, S Nolte… - High-Power Laser …, 2002 - spiedigitallibrary.org
At the Laser Zentrum Hannover investigations of possibilities to use femtosecond laser
pulses for direct ablative writing and microstructuring of solid materials have been started in …

Femtosecond versus picosecond laser ablation

A Ostendorf, G Kamlage, U Klug… - … and Photonics IV, 2005 - spiedigitallibrary.org
Results of ablation of different materials by femtosecond and picosecond laser pulses are
compared. Advantages and disadvantages of both laser systems are discussed. Two most …

Femtosecond laser materials processing

PS Banks, BC Stuart, AM Komashko… - … of Ultrafast Lasers II, 2000 - spiedigitallibrary.org
The use of femtosecond lasers allows materials processing of practically any material with
extremely high precision and minimal collateral damage. Advantages over conventional …

Micromachining using femtosecond lasers

HK Toenshoff, A Ostendorf, S Nolte… - … Symposium on Laser …, 2000 - spiedigitallibrary.org
Femtosecond laser systems have been proved to be effective tools for high precision micro-
machining. Almost all solid materials can be processed with high precision. The …

Femtosecond laser micromachining of technical materials

J Bonse, S Baudach, J Krueger… - High-Power Laser …, 2000 - spiedigitallibrary.org
Micromachining experiments were performed with Ti: sapphire laser pulses (130 fs-150 fs,
800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly …

Precision microfabrication of AlN and Al2O3 ceramics by femtosecond laser ablation

SH Kim, T Balasubramani, IB Sohn… - … and Photonics VII, 2008 - spiedigitallibrary.org
The characteristics of femtosecond laser ablation of AlN and Al 2 O 3 for precision
microfabrication are studied experimentally. Specifically, the process characteristics during …

Ablation of metals and semiconductors with ultrashort pulsed lasers: improving surface qualities of microcuts and grooves

A Ostendorf, C Kulik, T Bauer… - … applications of ultrafast …, 2004 - spiedigitallibrary.org
Femtosecond laser systems offer a good solution for the creation of straight microcuts and
grooves on macroscopic workpieces, as they are becoming more established in industrial …

Ultrafast pulse train micromachining

IH Chowdhury, X Xu, AM Weiner - Commercial and Biomedical …, 2003 - spiedigitallibrary.org
A new micromachining technique using user-defined trains of amplified femtosecond laser
pulses is described. In this method, a 2-fold Michelson interferometer is used to split each …

Dynamics of femtosecond laser induced ablation from solid surfaces

K Sokolowski-Tinten, J Bialkowski… - … Conference on Lasers …, 1998 - opg.optica.org
Advantages of ultrashort laser pulses in material processing applications have been
demonstrated in a number of cases, but the fundamental processes leading to structural …