Femtosecond laser micromachining of technical materials

J Bonse, S Baudach, J Krueger… - High-Power Laser …, 2000 - spiedigitallibrary.org
Micromachining experiments were performed with Ti: sapphire laser pulses (130 fs-150 fs,
800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly …

Femtosecond laser micromachining of sapphire

KS Kim, D Jones, E Bente, JM Girkin… - LEOS 2001. 14th …, 2001 - ieeexplore.ieee.org
Femtosecond laser micromachining of sapphire | IEEE Conference Publication | IEEE
Xplore Femtosecond laser micromachining of sapphire Abstract: 50 fs pulse laser …

Improved picosecond laser radiation for micromachining

T Herrmann, H Haloui, R Knappe, B Henrich… - … on Applications of …, 2006 - pubs.aip.org
Picosecond laser pulses are used to micro-machine virtually any material with highest
precision and minimal thermal impact. Best quality has been demonstrated at low fluence …

Ablation thresholds in ultrafast laser micromachining of common metals in air

P Mannion, J Magee, E Coyne… - Opto-Ireland 2002 …, 2003 - spiedigitallibrary.org
In the current work ablation of metal targets in air with femtosecond laser pulses is studied.
The laser pulses used for the study were 775 nm in wavelength, 150 fs in pulse duration and …

Ultrashort pulse laser interaction with dielectrics and polymers

J Krüger, W Kautek - Polymers and Light, 2004 - Springer
Femtosecond laser micromachining has excited vivid attention in various industrial fields
and in medicine owing to the advantages of ultrashort laser pulses compared to long-pulse …

Femtosecond laser processing of soft materials

S Baudach, J Krüger, W Kautek - The Review of Laser Engineering, 2001 - jstage.jst.go.jp
Ablation of polymer films such as polyimide, polycarbonate, polyethylenterephthalate,
polytetrafluoroethylene and polymethylmethacrylate were investigated with a Ti: sapphire …

Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps

R Le Harzic, D Breitling, M Weikert, S Sommer… - applied surface …, 2005 - Elsevier
Micromachining of steel, Cu and Al is studied. Ablation depths per pulse are deduced for
laser pulse durations between 100fs and 5ps for fluences in the range of 150mJcm− 2 to …

Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

M Meunier, B Fisette, A Houle… - … of Ultrafast Lasers …, 2003 - spiedigitallibrary.org
A microfabrication system with the use of a femtosecond laser was designed for 3D
processing of industrially important materials. The system includes a 120 fs, 1 kHz laser; …

High aspect-ratio micromachining of polymers with an ultrafast laser

Y Zhang, RM Lowe, E Harvey, P Hannaford… - Applied Surface …, 2002 - Elsevier
Laser ablation of various polymers has been studied using a beam of 100fs laser pulses at a
wavelength of 800nm. For a beam focussed by a plano-convex lens, high-quality machining …

Femtosecond laser ablation and nanostructuring

BN Chichkov, F Korte, J Koch, S Nolte… - High-Power Laser …, 2002 - spiedigitallibrary.org
At the Laser Zentrum Hannover investigations of possibilities to use femtosecond laser
pulses for direct ablative writing and microstructuring of solid materials have been started in …