In recent years we have studied binary amplitude diffractive optical elements fabricated by
means of electron beam lithography in the form of opaque chrome rulings on glass …

Excimer laser ablation is a versatile method to generate 2-or 3-D microstructured devices for
mechanics, fluidics, and optics. Particularly, if in 1-D the structure is predefined by a layer …

Diffractive optical elements (DOEs) provide solutions for applications that require complex
phase profiles which are difficult or impossible to make with conventional optics. Because of …

Enhancing the diffraction efficiency for direct laser writing of continuous-relief diffractive
optical elements (DOEs) is discussed. An influence of laser beam positioning errors on the …

Optical lithography with its 193nm technology is pushed to reach and shift its limits even
further. There is strong demand on innovations in illumination part of exposure tools. Current …

We describe the design and construction of a high-precision laser writing machine for the
direct generation of large-diameter rotationally symmetric diffractive optics with continuous …

New optical elements can be realized interferometrically by generating holographic
diffractive structures. For lasers in the infrared spectral region the rulings of these structures …

The progress in optics is related to wide application of computer-synthesized diffractive
optical elements (DOE). The lithography technology allows one to fabricate easily a DOE …

LIMO's unique production technology is capable to manufacture free form surfaces on
monolithic arrays larger than 250 mm with high precision and reproducibility. Different kinds …